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Volumn 226, Issue 1-6, 2003, Pages 81-88
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An antireflective silicon grating working in the resonance domain for the near infrared spectral region
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Author keywords
Antireflection surfaces; Diffraction gratings; Effective medium theory; Homogenization theory; Infrared; Modal method; Wet anisotropic etching
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Indexed keywords
ETCHING;
INFRARED RADIATION;
LASERS;
OPTICAL RESOLVING POWER;
RESONANCE;
SILICON;
SILICON GRATINGS;
DIFFRACTION GRATINGS;
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EID: 0141928852
PISSN: 00304018
EISSN: None
Source Type: Journal
DOI: 10.1016/j.optcom.2003.08.034 Document Type: Article |
Times cited : (37)
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References (23)
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