Neutral debris mitigation in laser produced extreme ultraviolet light source by the use of minimum-mass tin target

Applied Physics Express

Volumn 1, Issue 5, 2008, Pages 0560011-0560013

  Shimomura, Masashi ^a   Fujioka, Shinsuke ^a   Ando, Tsuyoshi ^a   Sakaguchi, Hirokazu ^a   Nakai, Yuki ^a   Yasuda, Yuzuri ^a   Nishimura, Hiroaki ^a   Nagai, Keiji ^a   Norimatsu, Takayoshi ^a   Nishihara, Katsunobu ^a   Miyanaga, Noriaki ^a   Izawa, Yasukazu ^a   Mima, Kunioki ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC PHYSICS; ATOMS; CONVERSION EFFICIENCY; DEBRIS; EXTREME ULTRAVIOLET LITHOGRAPHY; LASER PRODUCED PLASMAS; LASER PULSES; LASERS; LIGHT; LIGHT SOURCES; LIGHTING; PLASMAS; TARGETS; TITANIUM COMPOUNDS; ULTRAVIOLET DEVICES; ULTRAVIOLET RADIATION;

DEBRIS MITIGATIONS; EUV SOURCES; EXTREME ULTRA VIOLET LIGHT SOURCES; EXTREME ULTRAVIOLETS; GLASS SUBSTRATES; HIGH TEMPERATURES; LASER ENERGIES; LASER SPOTS; SN PLASMAS; SPATIAL DISTRIBUTIONS; TEMPORAL EVOLUTIONS; TOTAL AMOUNTS;

TIN;

EID: 57049097086     PISSN: 18820778     EISSN: 18820786     Source Type: Journal    
DOI: 10.1143/APEX.1.056001     Document Type: Article

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