Laser-heated discharge plasma extreme ultraviolet source

Journal of Physics D: Applied Physics

Volumn 43, Issue 10, 2010, Pages

  McGeoch, Malcolm W ^a  

^a PLEX LLC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

13.5 NM; A-CARBON; EXPERIMENTAL DATA; EXTREME ULTRAVIOLET SOURCES; HEATED DISCHARGES; PINCH PLASMA; SIMPLE MODEL; SOURCE SIZES; THERMAL CONDUCTION; Z PINCH; Z-PINCH PLASMAS;

CARBON DIOXIDE; CARBON DIOXIDE LASERS; CONVERSION EFFICIENCY; ELECTRIC DISCHARGES; LASER EXCITATION; LITHIUM; PINCH EFFECT; ULTRAVIOLET LASERS;

ULTRAVIOLET DEVICES;

EID: 77649207545     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/43/10/105201     Document Type: Article

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