Digital spectrometer-on-chip fabricated by step and repeat nanoimprint lithography on pre-spin coated films

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 2092-2095

  Peroz, C ^a   Dhuey, S ^b   Goltsov, A ^c   Volger, M ^d   Harteneck, B ^b   Ivonin, I ^c   Bugrov, A ^c   Cabrini, S ^b   Babin, S ^a   Yankov, V ^c  

^a ABEAM TECHNOLOGIES   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^c Nano Optic Devices   (United States)

^d MICRO RESIST TECHNOLOGY GMBH   (Germany)

Author keywords

Digital planar holography; Nanoimprint lithography; Nanophotonics; Spectrometer

Indexed keywords

COATED FILMS; DIGITAL PLANAR HOLOGRAPHY; HIGH-THROUGHPUT; LOW PRESSURES; NANO-IMPRINT; NANOFABRICATION PROCESS; OPTICAL PERFORMANCE; PATTERN TRANSFERS; RESIST FILMS; STEP-AND-REPEAT; WAVEGUIDE CORE;

HOLOGRAMS; NANOPHOTONICS; SILICA; SPECTROMETERS; SPECTROMETRY;

NANOIMPRINT LITHOGRAPHY;

EID: 79960065957     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2010.12.078     Document Type: Conference Paper

References (14)

1. J. Schnars Digital Holography 2005 Springer Berlin Heidelberg New York
2. V. Yankov Photonic Technol. Lett. IEEE 15 2003 410 412
3. S. Babin Appl. Phys. Lett. 95 2009 041105 041108
4. C. Peroz J. Vac. Sci. Technol. B 27 2009 3187
5. C. Peroz, S. Dhuey, M. Volger, Y. Wu, D. Olynick, and S. Cabrini Nanotechnology 21 2010 445301
6. J. Haisma, M. Verheijen, K.v.D. Heuvel, and J.v.D. Berg J. Vac. Sci. Technol. B4 1996 4124
7. S.Y. Chou, P.R. Krauss, and P.J. Renstrom Science 272 1996 85
8. M.D. Austin Appl. Phys. Lett. 84 2004 5299
9. M.D. Stewart, S.C. Johnson, and S.V. Sreenivasan J. Microlith. Microfab. Microsyst. 4 2005 011002
10. G.M. Schmidt J. Vac. Sci. Technol. B27 2009 573
11. D.P. Mancini J. Vac. Sci. Technol. B20 2002 2896
12. J.K. Yang J. Vac. Sci. Technol. B 27 2009 2622
13. M. Beck Microelectron. Eng. 61-62 2002 441
14. Adhesion promoter mr-APS1 and UV-NIL resist mr-UVCur21 commercially available from micro resist technology GmbH, Germany. Available from: < www.microresist.com >.