Digital optical spectrometer-on-chip

Applied Physics Letters

Volumn 95, Issue 4, 2009, Pages

  Babin, S ^a   Bugrov, A ^b   Cabrini, S ^c   Dhuey, S ^c   Goltsov, A ^b   Ivonin, I ^b   Kley, E B ^d   Peroz, C ^a   Schmidt, H ^d   Yankov, V ^b  

^a Beam Technologies   (United States)

^b Nano Optic Devices   (United States)

^c LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^d FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CENTRAL WAVELENGTH; FOCAL POINTS; HAFNIUM DIOXIDE; ON CHIPS; OPTICAL PERFORMANCE; OPTICAL SPECTROMETERS; SILICON DIOXIDE;

ELECTRON BEAMS; HAFNIUM; LIGHT SOURCES; LIGHT TRANSMISSION; PLASMA ETCHING; SILICA; SPECTROMETERS; SPECTROMETRY;

DIGITAL DEVICES;

EID: 68249125335     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3190199     Document Type: Article

References (6)

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6. V. Yankov S. Babin I. Ivonin, A. Goltsov, A. Morozov, L. Polonskiy, M. Spector, A. Talapov, E. B. Kley, H. Schmidt, R. Dahlgren, Proc. SPIE 0277-786X 5246, 608 (2003). 10.1117/12.511426