Fabrication of novel digital optical spectrometer on chip

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 6, 2009, Pages 3187-3191

  Babin, S ^a   Peroz, C ^a   Bugrov, A ^b   Goltsov, A ^b   Ivonin, I ^b   Yankov, V ^b   Dhuey, S ^c   Cabrini, S ^c   Kley, E B ^d   Schmidt, H ^d  

^a ABEAM TECHNOLOGIES   (United States)

^b Nano Optic Devices   (United States)

^c LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^d FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CENTRAL WAVELENGTH; FOCAL POINTS; HAFNIUM DIOXIDE; ON CHIPS; OPTICAL PERFORMANCE; OPTICAL SPECTROMETERS; SILICON DIOXIDE;

ELECTRON BEAMS; FABRICATION; HAFNIUM; LIGHT SOURCES; PLASMA ETCHING; SILICA; SPECTROMETERS; SPECTROMETRY;

DIGITAL DEVICES;

EID: 72849147580     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3237114     Document Type: Conference Paper

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