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Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 2435-2438

Batch fabricated dual cantilever resistive probe for scanning thermal microscopy

(3) Zhang, Y a Dobson, P S a Weaver, J M R a

a UNIVERSITY OF GLASGOW (United Kingdom)

Author keywords

Dual cantilever; Microfabrication; Scanning thermal microscopy (SThM)

Indexed keywords

CANTILEVER PROBE; DUAL CANTILEVER; EXPERIMENTAL DETERMINATION; MICROSCOPIC SCALE; OPTIMAL SENSOR; RESISTIVE PROBES; SCANNING THERMAL MICROSCOPY; SCANNING THERMAL MICROSCOPY (STHM); THERMAL COUPLING; THERMAL SCANS;

FABRICATION; INFRARED IMAGING; NANOCANTILEVERS; PROBES; SCANNING;

THERMAL CONDUCTIVITY;

EID: 79960031440 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2011.02.040 Document Type: Conference Paper

Times cited : (21)

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