New methods for calibrated Scanning Thermal Microscopy (SThM)

Proceedings of IEEE Sensors

Volumn , Issue , 2007, Pages 708-711

  Dobson, Phillip S ^a   Weaver, John M R ^a   Mills, Gordon ^b  

^a UNIVERSITY OF GLASGOW   (United Kingdom)

^b Kelvin Nanotechnology Ltd   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

PALLADIUM; SCANNING; THERMOMETERS;

RESISTANCE THERMOMETERS;

SENSORS;

EID: 48349091139     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.4388498     Document Type: Conference Paper

References (10)

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3. M. H. Li, J. J. Wu, Y. B. Gianchandani, "Surface micromachined polyimide scanning thermocouple probes", J.Microelectromechanical Systems, vol. 10, pp 3-9, 2001
4. G.Mills, H. Zhou, A. Midha,L. Donaldson, J. M. R. Weaver, "Scanning thermalmicroscopy using batch fabricated thermocouple probes", Applied physics letters, vol. 72, pp 2900-2902, 1998
5. R. Audbry, J. C. Jacquet, J. Weaver, O. Durand, P. Dobson, G. Mills, M. A. di Forte-Poisson, S. Cassette, S. L. Delage, "SThM temperature mapping and nonlinear thermal resistance evolution with bias on AlGaN/GaN HEMT devices", IEEE transactions on electron devices, vol. 54, pp 385-390, 2007
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7. L. Shi, A. Majumdar, "Thermal transport mechanisms at nanoscale point contacts", J heat transfer-transactions of the ASME, vol. 124, pp 329-337, 2002
8. H. Zhou, A. Midha, L.Bruchhaus, G. Mills, L. Donaldson, J. M. R. Weaver, "Novel scanning near-field optical microscopy/atomic force microscopy probes by combined micromachining and electron-beam nanolithography", J vacuum science and technology B, vol. 17, pp 1954-1958, 1999
9. P. S. Dobson, J. M. R. Weaver, D. P. Burt, M. N. Holder, N. R. Wilson, P. R. Unwin, J. V. Macpherson, "Electron beam lithographically-defined scanning electrochemical-atomic force microscopy probes: fabrication methodand application to high resolution imaging on heterogeneously active surfaces", Physical chemistry chemical physics, vol. 8, pp 3909-3914, 2006
10. P. S. Dobson, G. Mills, J. M. R. Weaver, "Microfabricated temperature standard based on Johnson noise measurement for the calibration of micro- and nano- thermometers", Review oo scientific instruments, vol. 76, Art. no. 054901, 2006.