Surface modification of polymers by plasma-assisted atomic layer deposition

Surface and Coatings Technology

Volumn 205, Issue SUPPL. 2, 2011, Pages

  Kaariainen T O ^a   Lehti, S ^a   Kaariainen M L ^a   Cameron, D C ^a  

^a LAPPEENRANTA UNIVERSITY OF TECHNOLOGY   (Finland)

Author keywords

Adhesion; Plasma assisted atomic layer deposition; PMMA; Polymers; TiO2

Indexed keywords

ATOMIC LAYER; ATR FTIR; CARBONACEOUS COMPOUNDS; DETRIMENTAL EFFECTS; FILM ADHESION; FUNCTIONALIZATIONS; HYDROPHOBIC SURFACES; LOW TEMPERATURES; OXYGEN PULSE; PLASMA GAS; PLASMA IGNITION; PLASMA METHODS; PLASMA MODIFICATIONS; PLASMA POWER; PMMA; POLYMER SURFACES; PROCESS CONDITION; PURGE GAS; SI(1 0 0); SURFACE MODIFICATION OF POLYMERS; THERMAL ALD; TIO; ULTRATHIN LAYERS;

ADHESION; ARGON; ATOMIC LAYER DEPOSITION; ATOMS; DEPOSITION; FUNCTIONAL POLYMERS; HYDROPHOBICITY; NITROGEN; NITROGEN PLASMA; PULSED LASER DEPOSITION; REACTION RATES; REFRACTIVE INDEX; SUBSTRATES; SURFACE CHEMISTRY; TITANIUM; TITANIUM DIOXIDE;

PLASMA DEPOSITION;

EID: 79959774783     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2011.03.094     Document Type: Article

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