Strategies for dynamic soft-landing in capacitive microelectromechanical switches

Applied Physics Letters

Volumn 98, Issue 23, 2011, Pages

  Jain, Ankit ^a   Nair, Pradeep R ^a   Alam, Muhammad A ^a  

^a Purdue University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN AND OPTIMIZATION; DIELECTRIC DEGRADATION; FEEDBACK CIRCUITRY; HARD LANDINGS; IMPACT VELOCITIES; MEMS SWITCHES; MICROELECTROMECHANICAL SWITCH; MOVABLE ELECTRODES; PERFORMANCE CHARACTERISTICS; PULL-IN; PULL-IN VOLTAGE; RESISTANCE IN SERIES; RF-MEMS SWITCHES; SOFT-LANDING; VOLTAGE SOURCE;

ELECTRIC SWITCHES; ELECTROSTATIC ACTUATORS;

LANDING;

EID: 79959362866     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3598960     Document Type: Article

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