RF MEMS for ubiquitous wireless connectivity: Part 2-application

IEEE Microwave Magazine

Volumn 5, Issue 4, 2004, Pages 50-65

  De Los Santos, Héctor J ^a   Fischer, Georg ^b   Tilmans, Harrie A C ^c   Van Beek, Joost T M ^d  

^a NanoMEMS Research LLC   (United States)

^b Lucent Bell Labs Europe   (Germany)

^c IMEC   (Belgium)

^d PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

HANDSETS; MICROWAVE SYSTEMS; NANOSATELLITES; STATE-OF-ART PERFORMANCE;

CAPACITORS; CMOS INTEGRATED CIRCUITS; ELECTRIC POWER UTILIZATION; GLOBAL POSITIONING SYSTEM; GLOBAL SYSTEM FOR MOBILE COMMUNICATIONS; MICROMACHINING; PHOTORESISTS; SATELLITES; STRENGTH OF MATERIALS; VARACTORS; WIRELESS TELECOMMUNICATION SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 12344322287     PISSN: 15273342     EISSN: None     Source Type: Trade Journal    
DOI: 10.1109/MMW.2004.1380278     Document Type: Article

References (20)

1. H.J. De Los Santos, Introduction to Microelectromechanical (MEM) Microwave Systems. Norwood, MA: Artech House (1999).
2. H.J. De Los Santos, "MEMS - A wireless vision," in 200 Int. MEMS Workshop, Singapore, pp. 35-42.
3. N. Pulsford, "Passive integration technology: Targeting small, accurate RF parts," RF Design Mag., p. 40, Nov. 2002.
4. x-FEM," in Proc. GaAs IC symposium, San Diego, CA, 2003, pp. 13-16.
5. Th.G.S.M. Rijks, J.T.M. van Beek, M.J.E. Ulenaers, J. De Coster, R. Puers, A. den Dekker, and L. Van Teeffelen, "Passive integration and RF MEMS: A toolkit for adaptive LC circuits," in Digest ESSCIRC 2003, Estoril, Portugal, p. 269.
6. J.T.M. van Beek, M.H.W.M. van Delden, A. van Dijken, P. van Eerd, A.B.M. Jansman, A.L.A.M. Kemmeren, Th.G.S.M. Rijks, P.C. Steeneken, J. den Toonder, M.J.E. Ulenaers, A. den Dekker, P. Lok, N. Pulsford, F. van Straten, and L. van Teeffelen, "High-Q integrated RF passives and RF-MEMS on Silicon," in Mat. Res. Soc. Symp. Proc., Boston, 2003, vol. 783, pp. B3.1.1-B3.1.
7. J.MJ. den Toonder and A.R. van Dijken, "Optimization of mechanical properties of thin free-standing metal films for RF-MEMS," in MRS Symp. Proc., San Francisco, 2004, vol. 820, paper O8.3.
8. Digital Light Processing: A Texas Instruments Technology [Online]. Available: http://www.dlp.com
9. H. Nieminnen, T. Ryhanen, V. Ermolov, and S. Silanto, "Micromechanical structure," U.S. patent 6 557 413 B2.
10. G.M. Rebeiz, RF MEMS Theory, Design, and Technology. New York: Wiley, 2003, pp. 185-220.
11. G. Fischer, W. Eckl, and G. Kaminski, "RF-MEMS and SiC/GaN as enabling technologies for a reconfigurable multiband/multistandard radio," Bell Labs Tech. J., vol. 7, no. 3, pp. 169-189, 2002.
12. G. Fischer, "Architectural benefits of wide bandgap RF power transistors for frequency agile basestation systems," in IEEE/MTT Wireless and Microwave Technology Conf. [CD-ROM], Clearwater, FL, 2004.
13. Th.G.S.M. Rijks, J.T.M. van Beek, P.G. Steeneken, M.J.E. Ulenaers, J. De Coster, and R. Puers, "RF MEMS tunable capacitors with large tuning ratio" in MEMS 2004 Dig., Maastricht, 2004, pp. 777-780.
14. C. Tassetti, "The tunable MEMS inductor and its application to future wideband reconfigurable RF systems, workshop reconfigurable MEMS for optimum RF/microwave circuits," in IEEE MTT-S 2004 Int. Microwave Symp. Dig., Workshop WSK [CD-ROM], Fort Worth, TX.
15. S.M. Taleie et al., "A new low-IF receiver using High-Q MEMS filter," in Proc. IEEE/MTT Wireless and Microwave Technology Conf. 2004, [CD-ROM], Clearwater, Florida, 2004.
16. H.J. De Los Santos, Y.-H. Kao, and D. Challoner, "MEMS-based RF switches for nanosatellite communications systems," in Proc. 2nd Int. Conf. MicroNanotechnology for Space Applications, Pasadena, CA, 1999, pp. 11-15.
17. W.B. Scott, "'Nanosat' technologies ready for national security missions," Aviation Week Space Techn., Jan. 14, 2004. Available: http://www.aviationnow.com/content/ncof/ncf_n59.thm
18. D. Judy, H. Newman, and J. Ebel, "RF MEMS switch lifetime testing," in IEEE MTT-S 2004 Int. Microwave Symp. Dig., Fort Worth, TX, Workshop WFF.1.
19. J. Maciel, S. Majumder, R. Morrison, and J. Lampen, "Reliability testing of ohmic MEMS switches," in IEEE MTT-S 2004 Int. Microwave Symp. Dig., Fort Worth, TX, Workshop WFF.1.
20. J.B. Muldavin, C.O. Bozler, J. Vian, S. Targonski, C.L. Keast, and M.A. Gouker, "Reliability testing and enhancement of RF MEMS capacitive switches," in IEEE MTT-S 2004 Int. Microwave Symp. Dig., Fort Worth, TX, Workshop WFF.1.