Pull-in/out analysis of nano/microelectromechanical switches with defective oxide layers

Applied Physics Letters

Volumn 95, Issue 7, 2009, Pages

  Xu, Yang ^a   Aluru, N R ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BROKEN BONDS; CAPACITANCE VOLTAGE; DEFECTIVE OXIDES; DIELECTRIC OXIDES; ELECTROSTATIC ANALYSIS; MECHANICAL ANALYSIS; MULTISCALES; VOLTAGE OFFSETS;

ELECTRIC POTENTIAL; SWITCHES;

SURFACE DEFECTS;

EID: 69249179233     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3211111     Document Type: Article

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