Characteristics of a minimum-debris optimum conversion efficiency tin-based LPP source

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6921, Issue , 2008, Pages

  Rollinger, Bob ^a   Bleiner, Davide ^a   Chokani, Ndaona ^a   Abhari, Reza S ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Atomic physics; Computational; EUV source; Hydrodynamics; Laser plasma; Lithography

Indexed keywords

ANALYTICAL MODEL; COMPUTATIONAL; COST OF OWNERSHIP; DEBRIS MITIGATION; EUV SOURCE; HIGH-VOLUME MANUFACTURING; HYDRODYNAMIC CODES; LASER PLASMA; LPP SOURCES; ND:YAG LASER BEAMS; NON-UNIFORMITIES; OPTIMUM LASER PARAMETERS; PLANAR TARGET; PULSE DURATIONS;

ATOMIC PHYSICS; COLLECTOR EFFICIENCY; COMPUTER SIMULATION; CONVERSION EFFICIENCY; DEBRIS; EFFICIENCY; EXTREME ULTRAVIOLET LITHOGRAPHY; HYDRODYNAMICS; LASER BEAMS; LASER PRODUCED PLASMAS; LIGHT SOURCES; MATHEMATICAL MODELS; PLASMA INTERACTIONS; SPHERES; TIN;

NEODYMIUM LASERS;

EID: 79959341024     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.772649     Document Type: Conference Paper

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