SCOPUS 정보 검색 플랫폼

Volumn 77, Issue 2, 2003, Pages 217-221

Studies of high-repetition-rate laser plasma EUV sources from droplet targets

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC PHYSICS; COMPUTER SIMULATION; ELECTRON DENSITY MEASUREMENT; HYDRODYNAMICS; LASER BEAMS; PLASMA DENSITY; ULTRAVIOLET SPECTROSCOPY;

EXTREME ULTRAVIOLET; HYDRODYNAMIC LASER PLASMA SIMULATION CODE; PLASMA INTERFEROGRAMS;

PLASMA SOURCES;

EID: 0038346611 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-003-2142-4 Document Type: Article

Times cited : (24)

References (17)

1
- 0000345742
- F. Jin, K. Gabel, M. Richardson, M. Kado, A.F. Vassiliev, D. Salzmann: Proc. SPIE 2015, 151 (1993)
- (1993) Proc. SPIE , vol.2015 , pp. 151
- Jin, F.¹ Gabel, K.² Richardson, M.³ Kado, M.⁴ Vassiliev, A.F.⁵ Salzmann, D.⁶

2
- 0000936342
- M. Richardson, K. Gabel, F. Jin, W.T. Silfvast: Proc. OSA Top. Mtg. Soft X-ray Projection Lithography, OSA, Washington DC 18, 156 (1993)
- (1993) Proc. OSA Top. Mtg. Soft X-Ray Projection Lithography, OSA, Washington DC , vol.18 , pp. 156
- Richardson, M.¹ Gabel, K.² Jin, F.³ Silfvast, W.T.⁴

3
- 0029544568
- F. Jin, M. Richardson, G. Shimkaveg, D. Torres: Proc. SPIE 2523, 81 (1995)
- (1995) Proc. SPIE , vol.2523 , pp. 81
- Jin, F.¹ Richardson, M.² Shimkaveg, G.³ Torres, D.⁴

4
- 0030622732
- M. Richardson, D. Torres, C. DePriest, F. Jin, G. Shimkaveg: Opt. Commun. 145, 109 (1998)
- (1998) Opt. Commun. , vol.145 , pp. 109
- Richardson, M.¹ Torres, D.² DePriest, C.³ Jin, F.⁴ Shimkaveg, G.⁵

5
- 0033131592
- L. Rymell, L. Malmqvist, M. Berglund, H.M. Hertz: Microelectron. Eng. 46, 453 (1999)
- (1999) Microelectron. Eng. , vol.46 , pp. 453
- Rymell, L.¹ Malmqvist, L.² Berglund, M.³ Hertz, H.M.⁴

6
- 0027847391
- M. Richardson, W.T. Silfvast, H.A. Bender, A. Hanzo, V.P. Yanovsky, F. Jin, J. Thorpe: Appl. Opt. 32, 6901 (1993)
- (1993) Appl. Opt. , vol.32 , pp. 6901
- Richardson, M.¹ Silfvast, W.T.² Bender, H.A.³ Hanzo, A.⁴ Yanovsky, V.P.⁵ Jin, F.⁶ Thorpe, J.⁷

7
- 84975571818
- F. Jin, M. Richardson: Appl. Opt. 34, No. 25, 5750 (1995)
- (1995) Appl. Opt. , vol.34 , Issue.25 , pp. 5750
- Jin, F.¹ Richardson, M.²

8
- 84975635954
- T. Kita, T. Harada, N. Nakano, H. Kuroda: Appl. Opt. 22, 512 (1983)
- (1983) Appl. Opt. , vol.22 , pp. 512
- Kita, T.¹ Harada, T.² Nakano, N.³ Kuroda, H.⁴

9
- 0003375848
- W. Schwanda, K. Eidmann, M.C. Richardson: J. X-ray Sci. Technol. 4, 8 (1993)
- (1993) J. X-Ray Sci. Technol. , vol.4 , pp. 8
- Schwanda, W.¹ Eidmann, K.² Richardson, M.C.³

10
- 0038474693
- To be published (patent pending)
- G. Schriever, M. Richardson: To be published (patent pending)
- Schriever, G.¹ Richardson, M.²

11
- 0003722605
- (Rutherford Appleton Laboratory)
- P. Rodgers, A. Rogoyski, S. Rose: MED101: a laser-plasma simulation code. User guide (Rutherford Appleton Laboratory, 1989)
- (1989) MED101: A Laser-Plasma Simulation Code. User Guide
- Rodgers, P.¹ Rogoyski, A.² Rose, S.³

12
- 0003987606
- (University of California and Lawrence Livermore National Laboratory)
- R. Lee: User Manual for RATION (University of California and Lawrence Livermore National Laboratory, 1990)
- (1990) User Manual for RATION
- Lee, R.¹

13
- 36749115492
- R. Benattar, C. Popovics, R. Sigel: Rev. Sci. Instr. 50(12), 1583 (1979)
- (1979) Rev. Sci. Instr. , vol.50 , Issue.12 , pp. 1583
- Benattar, R.¹ Popovics, C.² Sigel, R.³

14
- 84975586108
- U. Kogelschatz: Appl. Opt. 13(8), 1749 (1974)
- (1974) Appl. Opt. , vol.13 , Issue.8 , pp. 1749
- Kogelschatz, U.¹

15
- 0003957289
- (Cambridge University Press)
- I. Hutchinson: Principles of Plasma Diagnostics, (Cambridge University Press, 1992) pp. 112-115
- (1992) Principles of Plasma Diagnostics , pp. 112-115
- Hutchinson, I.¹

17
- 0037797975
- To be published
- J. Tawney, M. Richardson, R. Adhav: To be published
- Tawney, J.¹ Richardson, M.² Adhav, R.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.