Effect of Heat Treatment on the Microstructure and Residual Stresses in (Ti,Al)N Films

Journal of Materials Science and Technology

Volumn 27, Issue 5, 2011, Pages 385-392

  Yang, Ying ^a   Zhao, Shengsheng ^a   Gong, Jun ^a   Jiang, Xin ^b   Sun, Chao ^a  

^a INSTITUTE OF METAL RESEARCH   (China)

^b UNIVERSITY OF SIEGEN   (Germany)

Author keywords

(Ti,Al)N; Arc ion plating; Heat treatment; Microstructure; Stress distribution

Indexed keywords

(TI,AL)N; AMORPHOUS PHASE; ANNEALED FILMS; ANNEALING TEMPERATURES; ARC ION PLATING; AS-DEPOSITED FILMS; COLUMNAR CRYSTALS; IN-VACUUM; STRESS DEPTH; SUBGRAIN GROWTH; UNIFORM STRESS;

AMORPHOUS FILMS; ANNEALING; BELLS; ION IMPLANTATION; METALLIC FILMS; PHASE INTERFACES; RESIDUAL STRESSES; STRESS CONCENTRATION;

MICROSTRUCTURE;

EID: 79959331642     PISSN: 10050302     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1005-0302(11)60079-0     Document Type: Article

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