The depth distribution of residual stresses in (Ti,Al)N films: Measurement and analysis

Journal of Materials Research

Volumn 22, Issue 10, 2007, Pages 2659-2662

  Zhao, Sheng Sheng ^a   Du, Hao ^a   Hua, Wei Gang ^a   Gong, Jun ^a   Li, Jia Bao ^a   Sun, Chao ^a  

^a INSTITUTE OF METAL RESEARCH   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CORROSION; INTERFACES (MATERIALS); OPTICAL SYSTEMS; RESIDUAL STRESSES; TITANIUM;

CHEMICAL CORROSION; CURVATURE CHANGE; DEPTH DISTRIBUTION;

METALLIC FILMS;

EID: 35448947889     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2007.0363     Document Type: Article

References (20)

1. S. Paldey and S.C. Deevi: Single layer and multilayer wear resistant coatings of (Ti,Al)N: A review. Mater. Sci. Eng., A 342, 58 (2003).
2. X.L. Peng and T.W. Clyne: Mechanical stability of DLC films on metallic substrates: Part I - Film structure and residual stress levels. Thin Solid Films 312, 207 (1998).
3. E.L. Haase: The determination of lattice parameters and strains in stressed thin films using x-ray diffraction with Seeman-Bohlin focusing. Thin Solid Films 124, 283 (1985).
4. G.G. Stoney: The tension of metallic films deposited by electrolysis. Proc. R. Soc. London Ser. A 82, 172 (1909).
5. C.H. Ma, J.H. Huang, and H. Chen: Residual stress measurement in textured thin film by grazing-incidence x-ray diffraction. Thin Solid Films 418, 73 (2002).
6. C.M. Suh, B.W. Hwang, and K.R. Kim: Effect of ceramic coating thickness on residual stress and fatigue characteristic of 1Cr-1Mo-0.25V steel. Int. J. Mod. Phys. B 16 (1-2), 181 (2002).
7. L.A. Donohue, D.B. Lewis, W.D. Munz, M.M. Stack, S.B. Lyon, H.W. Wang, and D. Rafaja: The influence of low concentrations of chromium and yttrium on the oxidation behaviour, residual stress and corrosion performance of TiAlN hard coatings on steel substrates. Vacuum 55 (2), 109 (1999).
8. E. Zoestbergen, N.J.M. Carvalho, and J.T.M. De Hosson: Stress state or TiN/TiAlN PVD multilayers. Surf. Eng. 17(1), 29 (2001).
9. )N coatings using high-energy x-rays. Mater. Sci. Forum (Residual Stresses VII) 524-525, 619 (2006).
10. H. Windischmann and K.J. Gray: Stress measurement of CVD diamond films. Diamond Relat. Mater. 4, 837 (1995).
11. G.J. Leusink, T.G.M. Oosterlaken, G.C.A.M. Janssen, and S. Radelaar: In situ sensitive measurement of stress in thin films. Rev. Sci. Instrum. 63, 3143 (1992).
12. S.G. Malhotra, Z.U. Rek, S.M. Yalisove, and J.C. Bilello: Analysis of thin film stress measurement techniques. Thin Solid Films 301, 45 (1997).
13. Ch. Genzel and W. Reimers: A study of x-ray residual stress gradient analysis in thin layers with strong fibre texture. Phys. Status Solidi A 166, 751 (1998).
14. 3 thin films with Raman spectroscopy. Appl. Phys. Lett. 79, 4112 (2002).
15. D.S. Rickerby, A.M. Jones, and B.A. Bellamy: Internal stress in titanium nitride coatings: Modelling of complex stress systems. Surf. Coat. Technol. 36, 661 (1988).
16. R.Y. Fillit and A.J. Perry: Residual stress and x-ray elastic constants in highly textured physically vapor deposited coatings. Surf. Coat. Technol. 36, 647 (1988).
17. P. Danesh, B. Pantchev, D. Grambole, and B. Schmidt: Depth distributions of hydrogen and intrinsic stress in a-Si:H films prepared from hydrogen-diluted silane. J. Appl. Phys. 90, 3065 (2001).
18. S. Jeelani, S. Biswas, and R. Natarajan: Effect of cutting speed and tool rake angle on residual stress distribution in machining 2024-T351 aluminium alloy - Unlubricated conditions. J. Mater. Sci. 21, 2705 (1986).
19. A.C. Vlasveld, S.G. Harris, E.D. Doyle, D.B. Lewis, and W.D. Munz: Characterisation and performance of partially filtered arc TiAlN coatings. Surf. Coat. Technol. 149, 217 (2002).
20. F. Hollstein, R. Wiedemann, and J. Scholz: Characteristics of PVD-coatings on A.Z31hp magnesium alloys. Surf. Coat. Technol. 162, 261 (2003).