The influence of thermal annealing on residual stresses and mechanical properties of arc-evaporated TiCxN1-x (x = 0, 0.15 and 0.45) thin films

Acta Materialia

Volumn 50, Issue 20, 2002, Pages 5103-5114

  Karlsson, Lennart ^a   Horling A ^b   Johansson, M P ^b   Hultman, L ^b   Ramanath, G ^c  

^a SECO TOOLS AB   (Sweden)

^b LINKÖPING UNIVERSITY   (Sweden)

^c RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

Activation energies; Annealing; Arc evaporation; Hardness; PVD coating; Residual stresses; Thermal stability; Titanium carbonitride

Indexed keywords

ACTIVATION ENERGY; ANNEALING; METALLOGRAPHIC MICROSTRUCTURE; RESIDUAL STRESSES; THIN FILMS; TITANIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

ARC EVAPORATION;

METALLIC FILMS;

EID: 0037015980     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-6454(02)00365-8     Document Type: Article

References (32)

1. Dearnley P.A. J Eng Mater Technol. 107:1985;68.
2. Martin P.J., Bendavid A., Kinder T.J. Surf Coat Technol. 81:1996;36.
3. Karlsson L., Hultman L., Sundgren J.-E. Thin Solid Films. 371:2000;167.
4. Ljungcrantz H., Hultman L., Sundgren J.-E., Håkansson G., Karlsson L. J Appl Phys. 78:1995;832.
5. Yamamoto S., Ichimura H. J Mater Res. 11:1996;1149.
6. Odén M., Eriksson C., Håkansson G., Ljungcrantz H. Surf Coat Technol. 114:1999;39.
7. Karlsson L., Hultman L., Johansson M.P., Sundgren J.-E., Ljungcrantz H. Surf Coat Technol. 126:2000;1.
8. Dearnley P.A. Metal Technol. 9:1982;60.
9. Bull S.J., Evans P.C., Saleh A.S. Surf Coat Technol. 78:1996;42.
10. Valvoda V., Cerny R., Kuzel R., Dobiasova L., Musil J., Poulek V., et al. Thin Solid Films. 170:1989;201.
11. Oettel H., Wiedemann R., Preissler S. Surf Coat Technol. 74-75:1995;273.
12. Herr W., Broszeit E. Surf Coat Technol. 97:1997;335.
13. Perry A.J., Chollet L. Surf Coat Technol. 34:1988;123.
14. Elstner F., Kupper H., Richter F. Phys Stat Sol (A). 147:1995;373.
15. Uhrenius B. Evaluation of molar volumes in the Co-W-C system and calculation of volume fractions of phases in cemented carbides. Bildstein H., Eck R. Proceedings of the 13th International Plansee Seminar. 1993;. [Plansee, Reutte 2, 1993].
16. Toth L.E. Transition metal carbides and nitrides. Refractory materials. vol. 7:1971;Academic Press, New York and London.
17. Ljungcrantz H., Odén M., Hultman L., Greene J.-E., Sundgren J.-E. J Appl Phys. 80:1996;6725.
18. Sue J.A. Surf Coat Technol. 54/55:1992;154.
19. Oliver W.C., Pharr G.M. J Mater Res. 7:1992;1564.
20. Davis C.A. Thin Solid Films. 226:1993;30.
21. Windischmann H. J Appl Phys. 62:1987;1800.
22. Hultman L., Sundgren J.E., Greene J.E. J Appl Phys. 66:1989;536.
23. Mittemeijer E.J., Cheng L., van der Schaaf P.J., Brakman C.M., Korevaar B.M. Metall Trans A. 19:1988;925.
24. Perry A.J. J Vac Sci Technol, A. 6:1998;2140.
25. Komarek K.L. Atomic energy review, special issue 9. 1993;Int. Atomic Energy Agency, Vienna.
26. Wasilewski R.J., Kehl G.L. J Instrum Metals. 83:1954;94.
27. Repkin V.D. Chem Abs. 78:1973;254. [cited in Ref. [47]].
28. Munoz J.D., Arizmendi A., Mendoza-Allende A., Montemayor-Alderte J.A. J Mater Sci. 32:1997;3189.
29. Tsurekawa S., Matsubara S., Kurishita H., Yoshinaga H. Mater Trans, JIM. 32:1991;821.
30. Engström C., Hultman L., Birch J., Carlsson J.R.A., Lovoie C., Cabral C. J Vac Sci Technol, A. 17:1999;2920.
31. Hultman L., Engström C., Odén M. Surf Coat Technol. 133-134:2000;227.
32. Cullity B.D. Elements of X-ray diffraction. 2nd ed. 1978;Addison-Wesley, Reading, MA.