Thermal and optical characterization of collectors integrated in a Sn-DPP based SoCoMo

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6921, Issue , 2008, Pages

  Bianucci, Giovanni ^a   Brunton, Adam ^a   Cassol, Gian Luca ^a   Pirovano, Giorgio ^a   Zocchi, Fabio ^a   Mader, Arnaud ^b   Franken, Oliver ^c   Bergmann, Klaus ^c   Scheuermann, Hans ^b   Zink, Peter ^b  

^a Media Lario Technologies   (Italy)

^b PHILIPS RESEARCH LABORATORIES   (Germany)

^c FRAUNHOFER INSTITUTE FOR LASER TECHNOLOGY   (Germany)

Author keywords

Collection efficiency; Collector; DPP source; Extreme ultra violet lithography; Thermal management

Indexed keywords

COLLECTION EFFICIENCY; COLLECTOR; DISCHARGE-PRODUCED PLASMAS; DPP SOURCE; EXTREME ULTRAVIOLETS; FUTURE GENERATIONS; GRAZING INCIDENCE; MODELING APPROACH; OPTICAL CHARACTERISTICS; OPTICAL CHARACTERIZATION; OPTICAL DATA; POWER LEVELS; TEMPERATURE CONDITIONS; THERMO-OPTICAL;

TIN;

COLLECTOR EFFICIENCY;

EID: 79959329439     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.772977     Document Type: Conference Paper

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