EUV aources for the alpha-tools

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6151 I, Issue , 2006, Pages

  Pankert, Joseph ^a   Apetz, Rolf ^a   Bergmann, Klaus ^b   Damen, Marcel ^a   Derra, Günther ^a   Franken, Oliver ^b   Janssen, Maurice ^a   Jonkers, Jeroen ^a   Klein, Jürgen ^b   Kraus, Helmar ^a   Krücken, Thomas ^a   List, Andreas ^a   Loeken, Michael ^a   Mader, Arnaud ^b   Metzmacher, Christof ^a   Neff, Willi ^b   Probst, Sven ^b   Prümmer, Ralph ^b   Rosier, Oliver ^b   Schwabe, Stefan ^a   Seiwert, Stefan ^b   Siemons, Guido ^a   Vaudrevange, Dominik ^a   Wagemann, Dirk ^a   Weber, Achim ^a   Zink, Peter ^a   Zitzen, Oliver ^a   more..

^a PHILIPS RESEARCH LABORATORIES   (Germany)

^b FRAUNHOFER INSTITUTE FOR LASER TECHNOLOGY   (Germany)

Author keywords

EUV lithography; EUV source; Gas discharge plasma; Halogen cycle; Tin

Indexed keywords

CONTROL SYSTEMS; DISCHARGE LAMPS; EROSION; LASER PULSES; LIGHT EMISSION; TIN; VAPORS;

EUV LITHOGRAPHY; EUV SOURCE; GAS DISCHARGE PLASMA; HALOGEN CYCLE;

PLASMAS;

EID: 33745614594     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.657066     Document Type: Conference Paper

References (9)

1. J. Pankert et al., Proc. of SPIE (2002)
2. J. Pankert et al., "Philips' EUV lamp: Status and Roadmap", second EUV lithography conference, Antwerp, Belgium (2003)
3. G. Derra and W. Singer, "Collection efficiency of EUV sources", SPIE Microlithography 2003, March 23-28, Santa Clara (2003)
4. J. Pankert et al., "Update of Philips' EUV source", first EUV lithography conference, Dallas, Texas (2002)
5. G. Derra et al.: Tin Delivery Systems for Gas Discharge Sources, EUV Source Workshop, San Jose (2005)
6. patent filing WO2005025280A2
7. H. Meiling, V. Banine, N. Harned, B. Blum, P. Kürz, and H. Meijer, "Development of the ASML alpha demo tool", Proc. SPIE (2005)
8. J. Pankert et al., "Integrating Philips' extreme UV source in the alpha-tools", Proc. of SPIE (2005)
9. J. Pankert et al., EUVL Symposium, San Diego (2005)