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Applied Physics Letters

Volumn 98, Issue 22, 2011, Pages

Self-heating in piezoresistive cantilevers

(4) Doll, Joseph C a Corbin, Elise A b King, William P b Pruitt, Beth L a

a Stanford University (United States)

b University of Illinois at Urbana Champaign (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISPLACEMENT NOISE; FABRICATED DEVICE; FINITE DIFFERENCE MODEL; MEASUREMENT RESOLUTION; MICRO-CANTILEVERS; PIEZO-RESISTIVE; PIEZO-RESISTIVE CANTILEVERS; PIEZORESISTOR; SELF-HEATING; TEMPERATURE OPERATION; TEMPERATURE RISE;

HEATING; NANOCANTILEVERS; TEMPERATURE MEASUREMENT; THERMODYNAMIC PROPERTIES;

THERMAL CONDUCTIVITY;

EID: 79958831658 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3595485 Document Type: Article

Times cited : (19)

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