Size effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature size

Applied Physics Letters

Volumn 80, Issue 17, 2002, Pages 3195-3197

  Buhlmann S ^a   Dwir, B ^a   Baborowski, J ^a   Muralt, P ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT MODES; EPITAXIAL FERROELECTRIC; FEATURE SIZES; HARD MASKS; LATERAL DIMENSION; LIFT-OFF PROCESS; MESOSCOPICS; NB-DOPED SRTIO; PATTERNING PROCESS; PIEZOELECTRIC RESPONSE; PZT; RF-MAGNETRON SPUTTERING; SIZE EFFECTS;

EPITAXIAL GROWTH; LEAD; MAGNETRON SPUTTERING; SCANNING TUNNELING MICROSCOPY; THICK FILMS; ZIRCONIUM;

PIEZOELECTRICITY;

EID: 79958241557     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1475369     Document Type: Article

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