Focused ion-beam patterning of nanoscale ferroelectric capacitors

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3899-3902

  Stanishevsky, A ^a   Aggarwal, S ^a   Prakash, A S ^a   Melngailis, J ^a   Ramesh, R ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010172829     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590431     Document Type: Article

References (11)

1. T. Otsuki and K. Arita, Integr. Ferroelectr. 17, 31 (1997).
2. C. Steinbruchel, Mater. Sci. Technol. 8, 565 (1992).
3. K. Torii, K. Shoji, H. Kawakami, T. Itoga, N. Yokoyama, M. Moniwa, T. Kaga, and Y. Fujisaki, Electr. Eng. Jpn. 121, 43 (1997).
4. M. Hiratani, C. Okazaki, H. Hasegawa, N. Sugii, Y. Tarutani, and K. Tagaki, Jpn. J. Appl. Phys., Part 1 36, 5219 (1997).
5. A. Cofer, P. Rajora, S. DeOrnellas, and D. Keil. Integr. Ferroelectr. 16, 53 (1997).
6. J. Melngailis, J. Vac. Sci. Technol. B 5, 469 (1987).
7. A. C. Carter, J. S. Horwitz, D. B. Chrisey, J. M. Pond, S. W. Kirchoefer, and W. Chang, Integr. Ferroelectr. 17, 273 (1997).
8. T. J. Boyle, H. N. Al-Shareef, C. D. Buchheit, R. T. Cygan, D. Dimos, M. A. Rodriguez, B. Scott, and J. W. Ziller, Integr. Ferroelectr. 18, 213 (1997).
9. L. R. Harriott, Nucl. Instrum. Methods Phys. Res. B 55, 802 (1991).
10. A. Gruverman, H. Tokumoto, A. S. Prakash, S. Aggarwal, B. Yang, M. Wuttig, R. Ramesh, O. Auciello, and T. Venkatesan, Appl. Phys. Lett. 71, 3492 (1997).
11. A. Gruverman, O. Auciello, and H. Tokumoto, J. Vac. Sci. Technol. B 14, 602 (1996).