Structure and mechanical properties of TiAlN-WNx thin films

Surface and Coatings Technology

Volumn 205, Issue 20, 2011, Pages 4821-4827

  Reeswinkel, Thomas ^a   Sangiovanni, Davide G ^b   Chirita, Valeriu ^b   Hultman, Lars ^b   Schneider, Jochen M ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b LINKÖPING UNIVERSITY   (Sweden)

Author keywords

Ab initio calculation; Combinatorial sputtering; Elastic properties; HPPMS HiPIMS; Structure; TiAlN WNx

Indexed keywords

AB INITIO CALCULATIONS; COMBINATORIAL SPUTTERING; ELASTIC PROPERTIES; HPPMS/HIPIMS; STRUCTURE; TIALN-WNX;

CONCENTRATION (PROCESS); DC POWER TRANSMISSION; ELASTIC MODULI; ELASTICITY; HARDNESS; IONIZATION; VACANCIES;

CALCULATIONS;

EID: 79957632912     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2011.04.066     Document Type: Article

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