Microstructure and structure characteristics of cubic WNx compounds

Materials Science and Engineering: A

Volumn 288, Issue 1, 2000, Pages 47-53

  Shen, Y G ^a   Mai, Y W ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

Author keywords

Pair distribution function; Transmission electron microscopy; WNx films; X ray diffraction

Indexed keywords

COLUMNAR MICROSTRUCTURE; CUBIC TUNGSTEN NITRIDE; PAIR DISTRIBUTION FUNCTION; PHASE STRUCTURE;

ANNEALING; CRYSTAL MICROSTRUCTURE; ELECTRON ENERGY LOSS SPECTROSCOPY; MAGNETRON SPUTTERING; NUMERICAL METHODS; PARTIAL PRESSURE; STOICHIOMETRY; STRUCTURE (COMPOSITION); THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

NITRIDES;

EID: 0009992408     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5093(00)00822-4     Document Type: Article

References (21)

1. Marcus S.D., Foster R.F. Thin Solid Films. 263:1993;330.
2. Nakajima T., Watanabe K., Watanabe N. J. Electrochem. Soc. 134:1987;3175.
3. Chang K.M., Yeh T.H., Deng I.C. J. Appl. Phys. 81:1997;3670.
4. Tsai M.H., Sun S.C., Chiu H.T., Chuang S.H. Appl. Phys. Lett. 68:1996;1412.
5. Kim Y.T., Lee C.W., Min S.K., Park Y.W. Appl. Phys. Lett. 61:1992;537.
6. So F.C.T., Kolawa E., Zhao X.A., Nicolet M.A. Thin Solid Films. 153:1987;507.
7. Huber K.J., Aita C.R. J. Vac. Sci. Technol. A. 6:1988;1717.
8. So F.C.T., Kolawa E., Zhao X.A., Pan E.T.S., Nicolet M.A. J. Appl. Phys. 64:1988;2787.
9. Bosseboeuf A., Fourier A., Meyer F., Benhocine A., Gautherin G. Appl. Surf. Sci. 53:1991;353.
10. Boukhris L., Poitevin J.M. Thin Solid Films. 310:1997;222.
11. Moulder J.F., Stickle W.F., Sobol P.E., Bomben K.D. Handbook of X-ray Photoelectron Spectroscopy. 1992;Perkin Elmer, Eden Prairie, MN.
12. Egerton R.F. Electron Energy Loss Spectroscopy in the Electron Microscope. second ed. 1996;Plenum Press, New York.
13. Bauccio M. ASM Metals Reference Book. 1994;American Society for Metals, Metals Park, OH.
14. Shen Y.G., Mai Y.W., Zhang Q.C., McKenzie D.R., FcFall W.D., McBride W.E. J. Appl. Phys. 87:2000;177.
15. Shen Y.G., Yao J., O'Connor D.J., King B.V., MacDonald R.J. Phys. Rev. B. 56:1997;9894.
16. Heinemann D., Mader W. Ultramicroscopy. 74:1998;113.
17. Cockayne D.J., McKenzie D.R. Acta Crystallogr. A. 44:1988;870.
18. Zweck J., Tewes M., Hoffmann H. J. Phys. Condens. Matter C. 6:1994;835.
19. Shen Y.G., Mai Y.W., McBride W.E., McKenzie D.R., Zhang Q.C. Appl. Phys. Lett. 75:1999;2211.
20. Wilson A.J.C. International Tables for Crystallography. C:1995;Kluwer Academic Publishers, The Netherlands.
21. Kang J.H., Kim K.J. J. Appl. Phys. 86:1999;346.