A finite element analysis of the effects of residual stress, substrate roughness and non-uniform stress distribution on the mechanical properties of diamond-like carbon films

Diamond and Related Materials

Volumn 20, Issue 5-6, 2011, Pages 839-844

  Wei, Chehung ^a   Yang, Jui Feng ^a  

^a TATUNG UNIVERSITY   (Taiwan)

Author keywords

Finite element analysis; Mechanical properties; Non uniform stress; Residual stress; Substrate roughness

Indexed keywords

A-THERMAL; ADHESION STRENGTHS; CRITICAL ISSUES; DIFFERENT SUBSTRATES; DLC FILM; FINITE ELEMENT ANALYSIS; HARDNESS AND ELASTIC MODULUS; NEGATIVE STRESS; NON-UNIFORM STRESS; NONUNIFORM STRESS DISTRIBUTION; PRE-STRESS; RESIDUAL STRESS EFFECTS; ROUGH SUBSTRATES; SMALL VARIATIONS; SMOOTH SUBSTRATES; SUBSTRATE ROUGHNESS;

CARBON FILMS; DIAMOND LIKE CARBON FILMS; ELASTIC MODULI; FINITE ELEMENT METHOD; HARDNESS; NANOINDENTATION; RESIDUAL STRESSES; STRESS CONCENTRATION;

SUBSTRATES;

EID: 79956145820     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2011.04.004     Document Type: Article

References (32)

1. C. Donnet, and A. Erdemir Tribology of Diamond-Like Carbon Films 2008 Springer-Verlag 102
2. M. Ban, T. Hasegawa, S. Fujii, and J. Fujioka Diam. Relat. Mater. 12 2003 47
3. H. Windischmann J. Appl. Phys. 62 1987 1800
4. S. Xu, D. Flynn, B.K. Tay, S. Prawer, K.W. Nugent, S.R.P. Silva, Y. Lifshitz, and W.I. Milne Philos. Mag. B 76 1997 351
5. P.J. Fallon, V.S. Veerasamy, C.A. Davis, J. Robertson, G.A.J. Amaratunga, W.I. Milne, and J. Koskinen Phys. Rev. B 48 1993 4777
6. J.E. Yehoda, B. Yang, K. Vedam, and R. Messier J. Vac. Sci. Technol. A 6 1988 1631
7. B. Window, and K.-H. Müller Thin Solid Films 171 1989 183
8. K.-H. Müller J. Vac. Sci. Technol. A 40 1986 209
9. F.M. D'Heurle Metall. Trans. 1 1970 725
10. E.H. Hirsch J. Phys. D: Appl. Phys. 13 1980 2081
11. M.M. Morshed, B.P. McNamara, D.C. Cameron, and M.S.J. Hashmi J. Mater. Proc. Technol. 143-144 2003 922
12. M.M. Morshed, D.C. Cameron, B.P. McNamara, and M.S.J. Hashmi Surf. Coat. Technol. 169-170 2003 254
13. Y. Oka, M. Kirinuki, Y. Nishimura, K. Azuma, E. Fujiwara, and M. Yatsuzuka Surf. Coat. Teechnol. 186 2004 141
14. S. Kumar, D. Sarangi, P.N. Dixit, O.S. Panwar, and R. Bhattacharyya Thin Solid Films 346 1999 130
15. M. Ban, T. Hasegawa, S. Fujii, and J. Fujioka Diam. Relat. Mater. 12 2003 47
16. S. Zhang, H. Xie, X. Zeng, and P. Hing Surf. Coat. Technol. 122 1999 219
17. M. Bai, K. Kato, U. Umehara, and Y. Miyake Thin Solid Films 377-378 2000 138
18. L. Karlsson, L. Hultman, and J.-E. Sundgren Thin Solid Films 371 2000 167
19. A. Mani, P. Aubert, F. Mercier, H. Khodja, C. Berthier, and P. Houdy Surf. Coat. Technol. 201 2008 770
20. C.T. Chuang, C.K. Chao, R.C. Chang, and K.Y. Chu J. Mater. Proc. Technol. 201 2008 770
21. Y.-C. Huang S-Y Chang, C-H Chang Thin Solid Films 517 2009 4857
22. O.B. Lopez, M. Hoffman, A. Bendavid, and P.J. Martin Diam. Relat. Mater. 19 2009 1273
23. C. Wei, and J.Y. Yen Diam. Relat. Mater. 16 2007 1325
24. R.K. Singh, Z.H. Xie, A. Bendavid, P.J. Martin, P. Munroe, and M. Hoffman Diam. Relat. Mater. 17 2008 975
25. C. Wei, and C.H. Chen Diam. Relat. Mater. 17 2009 1534
26. C. Wei, J.F. Yang, and F.C. Tai Diam. Relat. Mater. 19 2010 518
27. A.C. Fischer-Cripps Nanoindentation 2nd ed 2004 Springer-Verlag New York p. 164
28. M.F. Doerner, and W.D. Nix J. Mater. Res. 1 1986 601
29. W.C. Oliver, and G.M. Pharr J. Mater. Res. 7 1992 1564
30. I.N. Sneddon Int. J. Eng. Sci. 3 1965 47
31. R.B. King Int. J. Solid Struct. 23 1987 1657
32. C. Wei, Y S. Wang, F. C. Tai, Diam. Relat. Mater. 18 (2008) 407.