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Volumn 19, Issue 10, 2010, Pages 1273-1280
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Substrate effects on the mechanical properties and contact damage of diamond-like carbon thin films
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Author keywords
Diamond like carbon; FIB; Fracture; Nanoindentation; Scratch; Thin films
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Indexed keywords
COATED SYSTEMS;
DIAMOND-LIKE CARBON;
DIAMOND-LIKE CARBON THIN FILMS;
DIFFERENT SUBSTRATES;
DLC FILM;
FIB;
FILM SURFACES;
HARD SUBSTRATE;
LATERAL CRACKS;
MICRO INDENTATION;
QUASI-STATIC;
SCRATCH;
SINGLE CRYSTAL SILICON;
SLIDING CONTACTS;
SODA LIME GLASS;
SOFT SUBSTRATES;
SUBSTRATE EFFECTS;
CARBON FILMS;
CRACK INITIATION;
CRACKS;
DAMAGE DETECTION;
DIAMONDS;
FRACTURE;
MECHANICAL PROPERTIES;
NANOINDENTATION;
STRESS CORROSION CRACKING;
SUBSTRATES;
THIN FILMS;
VAPOR DEPOSITION;
DIAMOND LIKE CARBON FILMS;
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EID: 77956061069
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2010.06.004 Document Type: Article |
Times cited : (26)
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References (32)
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