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Volumn 39, Issue 4 PART 1, 2011, Pages 963-970

Nanoscale transfer of energy and matter in plasma-surface interactions

Author keywords

Control of energy and matter; low temperature plasma; nanofabrication; nanostructures; plasma nanoscience

Indexed keywords

LOW TEMPERATURES; LOW-TEMPERATURE PLASMA; NANO SCALE; NANO-MATERIALS; NANOFABRICATION; NANOSCALE SYNTHESIS; PLASMA-AIDED NANOFABRICATION; PLASMA-SURFACE INTERACTIONS; SECURITY TECHNOLOGY; SUBNANOMETERS; TRANSPORT MECHANISM;

EID: 79956133885     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2010.2085020     Document Type: Conference Paper
Times cited : (7)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.