Electrical, morphological and structural properties of RF magnetron sputtered Mo thin films for application in thin film photovoltaic solar cells

Journal of Materials Science

Volumn 46, Issue 14, 2011, Pages 4913-4921

  Zoppi, Guillaume ^a   Beattie, Neil S ^a   Major, Jonathan D ^b   Miles, Robert W ^a   Forbes, Ian ^a  

^a NORTHUMBRIA UNIVERSITY   (United Kingdom)

^b DURHAM UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BACK CONTACT; DEPOSITED FILMS; ELECTRICAL CONDUCTIVITY; LATTICE STRESS; PHOTOVOLTAIC SOLAR CELLS; POST DEPOSITION ANNEALING; PREFERRED ORIENTATIONS; PROCESS PRESSURE; RADIO FREQUENCY MAGNETRON SPUTTERING; RESIDUAL OXYGEN; RF MAGNETRONS; SPUTTERING POWER; SPUTTERING PRESSURES; THIN FILM SOLAR CELLS; X-RAY DIFFRACTION DATA;

ELECTRIC CONDUCTIVITY; MOLYBDENUM; NANOSTRUCTURED MATERIALS; SOLAR CELLS; SOLAR POWER GENERATION; X RAY DIFFRACTION;

THIN FILMS;

EID: 79956099931     PISSN: 00222461     EISSN: 15734803     Source Type: Journal    
DOI: 10.1007/s10853-011-5404-0     Document Type: Article

References (21)

1. Repins I, Contreras MA, Egaas B, DeHart C, Scharf J, Perkins CL, To B, Noufi R (2008) Prog Photovolt Res Appl 16(3):235
2. Orgassa K, Schock HW, Werner JH (2003) Thin Solid Film 431-432:387
3. Scofield JH, Duda A, Albin D, Ballard BL, Predecki PK (1995) Thin Solid Film 260(1):26
4. Guillen C, Herrero J (2003) J Mater Process Technol 143-144:144
5. Hoffman RA, Lin JC, Chambers JP (1991) Thin Solid Film 206(1-2):230
6. Gordillo G, Grizalez M, Hernandez LC (1998) Sol Energy Mater Sol Cells 51(3-4):327
7. Shen YG (2003) Mater Sci Eng A 359(1-2):158
8. Kadam AA, Dhere NG, Holloway P, Law E (2005) J Vacuum Sci Technol A Vacuum Surf Film 23(4):1197
9. Alleman JL, Althani H, Noufi R, Moutinho H, Al-Jassim M, Hasoon F (2000) In: NCPV program review meeting. Denver, Colorado, p 239
10. Khatri H, Marsillac S (2008) J Phys Condens Matter 20(5):055206
11. Assmann L, Bernede JC, Drici A, Amory C, Halgand E, Morsli M (2005) Appl Surf Sci 246(1-3):159
12. Martinez MA, Guillen C (1998) Surf Coat Technol 110(1-2):62
13. Dale PJ, Samantilleke AP, Zoppi G, Forbes I, Peter LM (2008) J Phys D Appl Phys 41(8):085105
14. Zoppi G, Forbes I, Miles RW, Dale PJ, Scragg JJ, Peter LM (2009) Prog Photovolt Res Appl 17(5):315
15. Vergara L, Olivares J, Iborra E, Clement M, Sanz-Hervas A, Sangrador J (2006) Thin Solid Film 515(4):1814
16. Robbemond A, Thijsse BJ (1997) Nucl Instr Meth Phys Res B 127-128:273
17. Malhotra SG, Rek ZU, Yalisove SM, Bilello JC (1997) J Vacuum Sci Technol A Vacuum Surf Film 15(2):345
18. Schmid U, Seidel H (2005) Thin Solid Film 489(1-2):310
19. Moutinho H, Al-Jassim M, Levi DH, Dippo PC, Kazmerski LL (1998) J Vacuum Sci Technol A16(3):1251
20. Probst V, Rimmasch J, Riedl W, Stetter W, Holz J, Harms H, Karg F, Schock HW (1994) In: Proceedings of 1994 IEEE 1st world conference on photovoltaic energy conversion, New York, p 144
21. Vink TJ, Somers MAJ, Daams JLC, Dirks AG (1991) J Appl Phys 70(8):4301