Effect of substrate properties and thermal annealing on the resistivity of molybdenum thin films

Thin Solid Films

Volumn 489, Issue 1-2, 2005, Pages 310-319

  Schmid, U ^a   Seidel, H ^a  

^a SAARLAND UNIVERSITY   (Germany)

Author keywords

Electrical properties and measurements; Molybdenum; Physical vapour deposition (PVD); Surface roughness

Indexed keywords

ANNEALING; CERAMIC MATERIALS; ELECTRIC RESISTANCE; EVAPORATION; MOLYBDENUM; MORPHOLOGY; PHYSICAL VAPOR DEPOSITION; SURFACE ROUGHNESS; SURFACES;

ELECTRICAL PROPERTIES AND MEASUREMENTS; HYDRAULIC TEST BENCH; IMPURITY CONCENTRATION; OPTICAL REFLECTANCE;

THIN FILMS;

EID: 23144432569     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.05.003     Document Type: Article

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