Low-resistivity Mo thin films prepared by evaporation onto 30 cm × 30 cm glass substrates

Journal of Materials Processing Technology

Volumn 143-144, Issue 1, 2003, Pages 144-147

  Guillen C ^a   Herrero, J ^a  

^a CIEMAT   (Spain)

Author keywords

Electrical resistivity; Evaporation; Molybdenum; Structural strain

Indexed keywords

ELECTRIC CONDUCTIVITY; ENERGY UTILIZATION; EVAPORATION; GLASS; PHOTOVOLTAIC EFFECTS; RESIDUAL STRESSES; STRAIN; SUBSTRATES; THIN FILMS;

GLASS SUBSTRATES; PHOTOVOLTAIC DEVICES;

MOLYBDENUM;

EID: 0242523694     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-0136(03)00395-9     Document Type: Conference Paper

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