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Volumn 51, Issue 3-4, 1998, Pages 327-337

Structural and electrical properties of DC sputtered molybdenum films

Author keywords

Low resistivity; Molybdenum films

Indexed keywords

ELECTRIC CONDUCTIVITY MEASUREMENT; ELECTRIC CONTACTS; HALL EFFECT; MAGNETRON SPUTTERING; MOLYBDENUM; SEMICONDUCTING FILMS; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

EID: 0032570386     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(97)00236-5     Document Type: Article
Times cited : (65)

References (16)
  • 12
    • 17744368107 scopus 로고
    • T.J. Vink et al., J. Appl. Phys. 70 (8) (1991) 4301.
    • (1991) J. Appl. Phys. , vol.70 , Issue.8 , pp. 4301
    • Vink, T.J.1
  • 14
    • 0020766353 scopus 로고
    • A. Musa et al., J. Appl. Phys. 54 (6) (1983) 3260.
    • (1983) J. Appl. Phys. , vol.54 , Issue.6 , pp. 3260
    • Musa, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.