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Volumn 51, Issue 3-4, 1998, Pages 327-337
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Structural and electrical properties of DC sputtered molybdenum films
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Author keywords
Low resistivity; Molybdenum films
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Indexed keywords
ELECTRIC CONDUCTIVITY MEASUREMENT;
ELECTRIC CONTACTS;
HALL EFFECT;
MAGNETRON SPUTTERING;
MOLYBDENUM;
SEMICONDUCTING FILMS;
SUBSTRATES;
X RAY DIFFRACTION ANALYSIS;
HALL MOBILITY MEASUREMENTS;
MOLYBDENUM FILMS;
SOLAR CELLS;
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EID: 0032570386
PISSN: 09270248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0927-0248(97)00236-5 Document Type: Article |
Times cited : (65)
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References (16)
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