Ion-beam assisted deposition of thin molybdenum films studied by molecular dynamics simulation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 273-277

  Robbemond, Arie ^a   Thijsse, Barend J ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ATOMS; COMPUTER SIMULATION; FILM GROWTH; ION BEAMS; MOLECULAR DYNAMICS; MOLYBDENUM; POINT DEFECTS; SPUTTER DEPOSITION; SURFACE ROUGHNESS;

ATOMIC DISPLACEMENTS; ION BEAM ASSISTED DEPOSITION (IBAD); SURFACE ORIENTATION;

THIN FILMS;

EID: 0031547685     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00939-1     Document Type: Article

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