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Volumn 13, Issue 9, 2003, Pages 361-363
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An X- to Ku-band 3-bit digital MEMS varactor
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Author keywords
Capacitor; Microelectromechanical system (MEMS); Micromachining; Microwave; Millimeter wave; Switch; Varactor
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Indexed keywords
CAPACITANCE MEASUREMENT;
DIGITAL INTEGRATED CIRCUITS;
MICROELECTROMECHANICAL DEVICES;
MILLIMETER WAVE DEVICES;
SWITCHING CIRCUITS;
KA-BAND FREQUENCY;
KU-BAND OPERATION;
X-BAND OPERATION;
VARACTORS;
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EID: 0141954024
PISSN: 15311309
EISSN: None
Source Type: Journal
DOI: 10.1109/LMWC.2003.817118 Document Type: Letter |
Times cited : (22)
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References (4)
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