Influence of thickness and growth temperature on the optical and electrical properties of ZnO thin films

Thin Solid Films

Volumn 517, Issue 15, 2009, Pages 4303-4306

  Suchea, M ^a,b,c   Christoulakis, S ^a   Katharakis, M ^a   Vidakis, N ^a   Koudoumas, E ^a,d  

^a TECHNOLOGICAL EDUCATIONAL INSTITUTE OF CRETE   (Greece)

^b INSTITUTE OF ELECTRONIC STRUCTURE AND LASER   (Greece)

^c UNIVERSITY OF CRETE   (Greece)

^d TECHNOLOGICAL EDUCATIONAL INSTITUTE OF KAVALA   (Greece)

Author keywords

Electrical properties; Optical properties; Pulsed laser deposition; Zinc oxide

Indexed keywords

ABSORPTION BANDS; CORNING GLASS; ELECTRICAL PROPERTIES; GROWTH PARAMETERS; OPTICAL AND ELECTRICAL PROPERTIES; PULSED-LASER DEPOSITION TECHNIQUES; TRANSPARENT CONDUCTIVE THIN FILMS; ZNO THIN FILMS;

CONDUCTIVE FILMS; ELECTRIC PROPERTIES; FILM GROWTH; GROWTH TEMPERATURE; LASERS; OPTICAL PROPERTIES; PULSED LASER DEPOSITION; THIN FILMS; ZINC; ZINC OXIDE;

OXIDE FILMS;

EID: 67349237944     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.11.143     Document Type: Article

References (24)

1. Takata S., Minami T., and Nanto H. Thin Solid Films 135 (1986) 183
2. Hiramatsu M., Imaeda K., Horio N., and Mawata M. J. Vac. Sci. Technol. 16 (1998) 669
3. Matsubara K., Fons P., Iwata K., Yamada A., Sakurai K., Tampo H., and Niki S. Thin Solid Films 431-432 (2003) 369
4. Henley S.J., Ashfold M.N.R., and Cherns D. Surf. Coat. Technol. 177-178 (2004) 271
5. Shan F.K., Liu G.X., Lee W.J., Lee G.H., Kim I.S., Shin B.C., and Kim Y.C. J. Cryst. Growth 277 (2007) 284
6. Hu J., and Gordon R.G. J. Appl. Phys. 71 (1992) 1992
7. Suzuki A., Matsushita T., Wada N., Sakamoto Y., and Okuda M. Jpn. J. Appl. Phys., Part 2 35 (1996) L56
8. Hirata G.A., McKittrick J., Siquerios J., Lopez O.A., Cheeks T., Contreras O., and Yi J.Y. J. Vac. Sci. Technol. A 14 (1996) 791
9. King S.L., Gardeniers J.G.E., and Boyd I.W. Appl. Surf. Sci. 96-98 (1996) 811
10. Vasco E., Zaldo C., and Vázquez L. J. Phys.: Condens. Mater. 13 (2001) 28 L663
11. Suchea M., Katharakis M., Christoulakis S., Katsarakis N., and Kiriakidis G. J. Phys.: Conf. Series 10 (2005) 147
12. Christoulakis S., Suchea M., Koudoumas E., Katharakis M., Katsarakis N., and Kiriakidis G. Appl. Surf. Sci. 252 (2006) 5351
13. Suchea M., Christoulakis S., Katharakis M., Kiriakidis G., Katsarakis N., and Koudoumas E. Appl. Surf. Sci. 253 (2007) 8141
14. Suchea M., Christoulakis S., Tibeica C., Katharakis M., Kornilios N., Efthimiopoulos T., and Koudoumas E. Appl. Surf. Sci. 254 (2008) 5475
15. Zhao J.L., Li X.M., Bian J.M., Yu W.D., and Gao X.D. J. Cryst. Growth 276 (2005) 507
16. Zhu B.L., Sun X.H., Guo S.S., Zhao X.Z., Wu J., Wu R., and Liu J. Jpn. J. Appl. Phys. 45 (2006) 7860
17. Ren T., Baker H.R., and Poduska K.M. Thin Solid Films 515 (2007) 7976
18. Pan H.C., Shiao M.H., Su C.Y., and Hsiao C.N. J. Vac. Sci. Technol. A23 (2005) 1187
19. Bentes L., Ayouchi R., Santos C., Schwarz R., Sanguino P., Conde O., Peres M., Monteiro T., and Teodoro O. Superlattices Microstruct. 42 (2007) 152
20. Muth J.F., Kolbas R.M., Sharma A.K., Oktyabrski S., and Narayan J. J. Appl. Phys. 85 (1999) 7884
21. Sans J.A., Segura A., Mollar M., and Mari B. Thin Solid Films 453-454 (2004) 251
22. Look D.C., Hemsky J.W., and Sizelove J.R. Phys. Rev. Lett. 82 (1999) 2552
23. Kohan A.F., Ceder G., Morgan D., and Van De Walle C.G. Phys. Rev. B 61 (2000) 15019
24. Zou J., Zhou S., Xia C., Hang Y., Xu J., Gu S., and Zhang R. J. Cryst. Growth 280 (2005) 185