Effect of film thickness on the piezoelectric properties of lead zirconate titanate thick films fabricated by aerosol deposition

Journal of the American Ceramic Society

Volumn 94, Issue 5, 2011, Pages 1509-1513

  Han, Guifang ^a   Ryu, Jungho ^a   Yoon, Woon Ha ^a   Choi, Jong Jin ^a   Hahn, Byung Dong ^a   Park, Dong Soo ^a  

^a Korea Institute of Material Science   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSOL DEPOSITION; CLAMPING EFFECTS; DIELECTRIC AND PIEZOELECTRIC PROPERTIES; LEAD ZIRCONATE TITANATE; LEAD ZIRCONATE TITANATE THICK FILM; MIXED POWDER; PIEZOELECTRIC PROPERTY; PLATINIZED SILICON SUBSTRATES; POLYVINYLIDENE FLUORIDES; POST ANNEALING; PZT; PZT THICK FILMS; SUBMICROMETERS;

ATMOSPHERIC AEROSOLS; FABRICATION; FERROELECTRIC CERAMICS; PIEZOELECTRICITY; RESPIRATORY MECHANICS; SEMICONDUCTING LEAD COMPOUNDS; THICK FILMS; VAPOR DEPOSITION;

COMPOSITE FILMS;

EID: 79955487003     PISSN: 00027820     EISSN: 15512916     Source Type: Journal    
DOI: 10.1111/j.1551-2916.2010.04276.x     Document Type: Article

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