PZT thick films for sensor and actuator applications

Journal of the European Ceramic Society

Volumn 27, Issue 13-15, 2007, Pages 4177-4180

  Gebhardt, Sylvia ^a   Seffner, Lutz ^a   Schlenkrich, Falko ^a   Schönecker, Andreas ^a  

^a FRAUNHOFER INSTITUTE FOR CERAMIC TECHNOLOGIES AND SYSTEMS   (Germany)

Author keywords

Actuators; Dielectric properties; Films; PZT; Sensors

Indexed keywords

DENSIFICATION; FERROELECTRICITY; MICROSYSTEMS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY; THICK FILMS;

DIRECT COATING; TRANSIENT LIQUID PHASE FORMATION;

PIEZOELECTRIC CERAMICS;

DENSIFICATION; FERROELECTRICITY; MICROSYSTEMS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC CERAMICS; PIEZOELECTRICITY; THICK FILMS;

EID: 34347339516     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2007.02.122     Document Type: Article

References (10)

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