Room temperature impact consolidation (RTIC) of fine ceramic powder by aerosol deposition method and applications to microdevices

Journal of Thermal Spray Technology

Volumn 17, Issue 2, 2008, Pages 181-198

  Akedo, Jun ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Aerosol; Ceramic; Coating; Cold spray; Consolidation; Deposition; Impact; MEMS; Optical device; Pattern; RF component

Indexed keywords

AEROSOLS; CERAMIC COATINGS; DEPOSITION; MEMS; THERMAL SPRAYING; THIN FILMS;

AEROSOL DEPOSITION; COLD SPRAY; ROOM TEMPERATURE IMPACT CONSOLIDATION;

SPRAYED COATINGS;

EID: 44149109893     PISSN: 10599630     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11666-008-9163-7     Document Type: Review

References (68)

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64. 64. S.-M. Nam H. Yabe H. Kakemoto S. Wada T. Tsurumi J. Akedo 2004 Low Temperature Fabrication of BaTiO 3 Thick Films by Aerosol Deposition Method and Their Electric Properties Trans MRS Jpn. 29 4 1215 1218 1:CAS:528:DC%2BD2MXhsVemtbk%3D S.-M. Nam, H. Yabe, H. Kakemoto, S. Wada, T. Tsurumi, J. Akedo: Low Temperature Fabrication of BaTiO 3 Thick Films by Aerosol Deposition Method and Their Electric Properties, Trans MRS Jpn., 2004, 29 (4), pp 1215-1218
65. 65. S. Sugimoto K. Haga, M. Nakada, T. Kagotani, K. Inomata, and J. Akedo “Magnetic Properties of Fe/(NiZnCu)Fe 2 O 4 Composite Films Prepared by Aerosol Deposition Method,” INTERMAG 2005, 2005, Nagoya, Japan, April 4-8, EC-04
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67. 67. M. Nakada K. Ohashi M. Lebedev J. Akedo 2005 Electro-Optic Properties of Pb(Zr1 − xTix)O 3 (X = 0, 0.3, 0.6) Films Prepared by Aerosol Deposition Jpn. J. Appl. Phys. 44 L1088 L1090 10.1143/JJAP.44.L1088 1:CAS:528:DC%2BD2MXhtV2gs7bO M. Nakada, K. Ohashi, M. Lebedev, J. Akedo: Electro-Optic Properties of Pb(Zr1 − xTix)O 3 (X = 0, 0.3, 0.6) Films Prepared by Aerosol Deposition, Jpn. J. Appl. Phys., 2005, 44, pp L1088-L1090
68. 68. M. Iwanami M. Nakada H. Tsuda K. Ohashi J. Akedo 2007 Ultra Small Electro-optic Field Probe Fabricated by Aerosol Deposition IEICE Electro. Express 4 2 26 32 10.1587/elex.4.26 M. Iwanami, M. Nakada, H. Tsuda, K. Ohashi, J. Akedo: Ultra Small Electro-optic Field Probe Fabricated by Aerosol Deposition, IEICE Electro. Express, 2007, 4 (2), pp 26-32