Antireflection coatings for deep ultraviolet optics deposited by magnetron sputtering from Al targets

Optics Express

Volumn 19, Issue 8, 2011, Pages 7507-7512

  Liao, Bo Huei ^a   Lee, Cheng Chung ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COATINGS; COATINGS; FLUORINE; MULTILAYER FILMS; ORGANIC POLYMERS; OXIDE FILMS; QUARTZ; REFRACTIVE INDEX;

ALUMINUM TARGET; CROSS-SECTIONAL MORPHOLOGY; DEEP ULTRAVIOLET OPTICS; EXTINCTION COEFFICIENTS; FLUORINE DOPED OXIDES; HIGH TRANSMITTANCE; POROUS STRUCTURES; PULSE MAGNETRON SPUTTERING; QUARTZ SUBSTRATE; ROOM TEMPERATURE;

ANTIREFLECTION COATINGS;

EID: 79953843954     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.19.007507     Document Type: Article

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