Optical and mechanical properties of AlF3 films produced by pulse magnetron sputtering of Al targets with CF4/O2 gas

Optical Review

Volumn 16, Issue 4, 2009, Pages 505-510

  Liao, Bo Huei ^a   Lee, Cheng Chung ^a   Jaing, Cheng Chung ^b   Liu, Ming Chung ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

^b MINGHSIN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Aluminium fluoride; Optical property; Pulse magnetron sputtering; Sputtering power; Transmittance spectrum

Indexed keywords

EID: 70349958190     PISSN: 13406000     EISSN: 13499432     Source Type: Journal    
DOI: 10.1007/s10043-009-0099-z     Document Type: Article

References (20)

1. C. C. Lee, M. C. Liu, M. Kaneko, K. Nakahira, and Y. Takano: Appl. Opt. 44 (2005) 7333.
2. F. Rainer, W. H. Lowdermilk, D. Milam, C. K. Carniglia, T. T. Hart, and T. L. Lichtenstein: Appl. Opt. 24 (1985) 496.
3. J. D. Targove, J. P. Lehan, L. J. Lingg, H. A. Macleod, J. A. Leavitt, and L. C. McIntyre: Appl. Opt. 26 (1987) 3733.
4. N. Toyoda and I. Yamada: Surf. Coat. Technol. 201 (2007) 8620.
5. Y. Taki: Vacuum 74 (2004) 431.
6. T. Yoshida, K. Nishimoto, K. Sekine, and K. Etoh: Appl. Opt. 45 (2006) 1375.
7. M. Kennedy, D. Ristau, and H. S. Niederwald: Thin Solid Films 333 (1998) 191.
8. B. H. Liao, M. C. Liu, and C. C. Lee: Appl. Opt. 47 (2008) C41.
9. C. C. Lee, B. H. Liao, and M. C. Liu: Opt. Express 15 (2007) 9152.
10. C. C. Lee, B. H. Liao, and M. C. Liu: Opt. Express 16 (2008) 6904.
11. A. Zuber, N. Kaiser, and J. L. Stehlé: Thin Solid Films 261 (1995) 37.
12. A. R. Forouhi and I. Bloomer: Phys. Rev. B 38 (1998) 1865.
13. C. C. Lee, C. L. Tien, W. S. Sheu, and C. C. Jaing: Rev. Sci. Instrum. 72 (2001) 2128.
14. G. G. Stoney: Proc. R. Soc. London, Ser. A 82 (1909) 172.
15. P. Hariharan, B. F. Oreb, and T. Eiju: Appl. Opt. 26 (1987) 2504.
16. M. J. Kushner: J. Appl. Phys. 53 (1982) 2923.
17. K. Iwase, P. C. Selvin, G. Sato, and T. Fujii: J. Phys. D 35 (2002) 1934.
18. H. J. Koa, H. J. Leea, K. M. Leeb, and C. K. Choi: J. Ceram. Process. Res. 7 (2006) 172.
19. A. Anders: Thin Solid Films 502 (2006) 22.
20. M. Zukic, D. G. Torr, J. F. Spann, and M. R. Torr: Appl. Opt. 29 (1987) 4284.