Surface finish and optical quality of CaF2 for UV-lithography applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3334, Issue , 1998, Pages 1048-1054

  Duparré, Angela ^a   Thielsch, Roland ^a   Kaiser, Norbert ^a   Jakobs, Stefan ^a   Mann, Klaus R ^b   Eva, Eric ^b  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^b LASER LABORATORIUM GÖTTINGEN E V   (Germany)

Author keywords

Calciumfluoride; Optical properties; Surface roughness; Thin film coatings; UV lithography

Indexed keywords

FRICTION; LASER DAMAGE; LITHOGRAPHY; METAL ANALYSIS; OPTICAL PROPERTIES; SURFACE PROPERTIES; SURFACE ROUGHNESS; THIN FILM DEVICES; THIN FILMS;

CALCIUMFLUORIDE; DAMAGE THRESHOLDS; SCATTER LOSSES; SURFACE FINISHING; THIN FILM COATINGS; UV-LITHOGRAPHY;

SUBSTRATES;

EID: 0008487710     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.310735     Document Type: Conference Paper

References (5)

1. N. Kaiser, R. Thielsch, M. Mertin, H. Bauer, E. Welsch, "Excimer laser interactions with dielectric thin films for advanced projection optics", Proc. SPIE 3051, pp. 940-947, 1997
2. C. Ruppe, A. Duparré, "Roughness analysis of optical films and substrates by atomic force microscopy," Thin Solid Films 288, pp. 8-13, 1996
3. A. Duparré, S. Gliech, "Quality assessment from supersmooth to rough surfaces by multiple-wavelength ligh scattering measurement", Proc. SPIE 3141, pp.57-64 ,1997
4. 2 dielectric coatings for excimer lasers", Thin Solid Films 260, pp.86-92, 1995
5. A. Duparré, S. Jakobs, N. Kaiser, "Influence of substrate surface and film roughness on the quality of optical coatings for the UV spectral region," Proc. SPIE, 3110, pp. 509-516, 1997