Recent developments of industrial excimer laser technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3092, Issue , 1997, Pages 485-492

  Stamm, Uwe ^a   Pätzel, Rainer ^a   Bragin, Igor ^a   Kleinschmidt, Jürgen ^a   Voß, Frank ^a   Basting, Dirk ^a  

^a Lambda Physik GmbH   (Germany)

Author keywords

Annealing; Excimer laser; Lithography; Marking; Micromachining

Indexed keywords

AERODYNAMICS; ANNEALING; CHEMICAL LASERS; COMPOSITE MICROMECHANICS; EXCIMER LASERS; FLOW OF GASES; GAS LASERS; KRYPTON; LASERS; MICROMACHINING;

EXCIMER; EXCIMER WAVELENGTHS; HIGH-POWER; INDUSTRIAL REQUIREMENTS; LASER TUBES; MARKING; THIN-FILM;

TECHNOLOGY;

EID: 0039762862     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.270114     Document Type: Conference Paper

References (0)