High-performance coatings for micromechanical mirrors

Applied Optics

Volumn 45, Issue 7, 2006, Pages 1602-1607

  Gatto, Alexandre ^a   Yang, Minghong ^a   Kaiser, Norbert ^a   Heber, Jörg ^b   Schmidt, Jan Uwe ^b   Sandner, Thilo ^b   Schenk, Harald ^b   Lakner, Hubert ^b  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^b FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; LIGHT MODULATORS; MIRRORS; OPTICAL PROPERTIES; SEMICONDUCTOR MATERIALS;

HIGH-PERFORMANCE COATINGS; MICROMECHANICAL MIRRORS; OPTICAL PERFORMANCES;

OPTICAL COATINGS;

EID: 33645278329     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.001602     Document Type: Article

References (4)

1. U. Ljungblad, U. Dauderstädt, P. Dürr, T. Sandström, H. Buhre, and H. Lakner, "New laser pattern generator for DUV using spatial light modulator," Microelectron. Eng. 57-58, 23-29 (2001).
2. T. Sandström, U. B. Ljungblad, P. Dürr, and H. Lakner, "High-performance laser pattern generation using spatial light modulators (SLM) and deep-UV radiation, in Emerging Lithographic Technologies V, E. A. Dobisz and R. L. Engelstad,eds. Proc. SPIE 4343, 35-45 (2001).
3. R. Thielsch, "Optical coatings for the DUV/VUV," in Interference Coatings, N. Kaiser and H. K. Pulker, eds., Vol. 88 of Springer Series in Optical Sciences (Springer, 2003), pp. 257-279.
4. J. Heber, A. Gatto, and N. Kaiser, "Spectrophotometer in the vacuum UV," in Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization, G. J. Exarhos, A. H. Guenther, N. Kaiser, K. L. Lewis, M. J. Soileau, C. J. Stolz, A. Giesen, and H. Weber, eds., SPIE 4932, 544-548 (2002).