Silicon carbide phononic crystal cavities for micromechanical resonators

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 1377-1381

  Ziaei Moayyed, M ^a   Su, M F ^b   Reinke, C ^a   El Kady, I F ^b   Olsson III, R H ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b University of New Mexico   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC MIRRORS; ALN; CMOS COMPATIBLE; HIGH-Q RESONATORS; MICROMECHANICAL RESONATOR; PHONONIC CRYSTAL;

ALUMINUM NITRIDE; COMMUNICATION SYSTEMS; MECHANICAL ENGINEERING; MECHANICS; MEMS; NITRIDES; OPTICAL RESONATORS; PHONONS; REACTIVE ION ETCHING;

SILICON CARBIDE;

EID: 79953785042     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734691     Document Type: Conference Paper

References (24)

1. M. M. Sigalas, E. N. Economou, "Elastic and acoustic wave band-structure," J. Sound and Vibr., vol. 158 (2), pp. 377-382, 1992.
2. M. S. Kushwaha, P. Halevi, L. Dobrzynski, and B. Djafari-Rouhani, "Acoustic Band-structure of Periodic Elastic Composites," Phys. Rev. Lett., vol. 71, pp. 2022-2025, 1993.
3. R. H. Olsson III and I. El-Kady, Meas. Sci. Tech., vol. 20, 012002, 2009.
4. S. Mohammadi, A. A. Eftekhar, A. Khelif, H. Moubchir, W. D. Hunt, and A. Adibi, "High Q micromechanical resonator in a two dimensional phononic crystal slabs," Appl. Phys. Lett., vol. 95, 051906, 2009.
5. R. H. Olsson III, I. F. El-Kady, M. F. Su, M. R. Tuck, and J. G. Fleming, "Microfabricated VHF acoustic crystals and waveguides," Sensors Actuators A, vol.145-146, pp. 87-93, 2008.
6. M. Ziaei-Moayyed, M. F. Su, C. M. Reinke, I. El-Kady, and R. H. Olsson III, "Silicon Carbide phononic crystals for high f.Q micromechanical resonators," IEEE Ultrasonics Symposium, San Diego, CA, October 2010 - in press.
7. A. Khelif A, A. Choujaa, B. Djafari-Rouhani, W. Wilm, S. Ballandras, and V. Laude, "Trapping and guiding of acoustic waves by defect modes in a full-band-gap ultrasonic crystal," Phys. Rev. B, vol. 68, 214301, 2003.
8. Y. Pennec, B. Djafari-Rouhani, A. Khelif, J. O. Vasseur, P. A. Deymier, "Tunable Filtering and Demultiplexing in Phononic Crystals with HollowCylinders," Phys. Rev. E, vol. 69, 046608-1-6 (2004).
9. R. H. Olsson, S. X. Griego, I. El-Kady, M. Su, Y. Soliman, D. Goettler, and, Z. Leseman "Ultrahigh frequency (UHF) phononic crystal devices operating in mobile communication bands," Tech. Dig. IEEE Intl. Ultrasonics Symp., pp.1150-3, 2009.
10. S. A. Bhave, D. Gao, R. Maboudian, and R. T. Howe, "Fully- differential poly-SiC lame mode resonator and checkerboard filter," IEEE Int. Conf. on Micro Electro Mechanical Systems, pp.223-226, 2005 (Pubitemid 41462337)
11. Y. T. Yang, K. L. Ekinci, K.L, M. H. Huang, L. M. Schiavone, M. L. Roukes, C. A. Zorman, and M. Mehregany, "Monocrystalline SiC nanoelectromechanical systems," App. Phys. Lett., vol. 78, 162-164, 2001.
12. C. T.-C. Nguyen, "MEMS technology for timing and frequency control," IEEE Trans. Ultrasonics, Ferroelectrics and Frequency Control, vol. 54, pp. 251-270, 2007.
13. G. Piazza, G.; Stephanou, P. J.; Pisano, A. P. Piezoelectric aluminum nitride vibrating contour-mode MEMS resonators J. Microelectromechanical Syst., vol.15, no.6, pp.1406-18, 2006. (Pubitemid 44921759)
14. S.A. Chandorkar, M. Agrawal, R. Melamud, R. N. Candler, K. E. Goodson, T. W. Kenny, "Limits of quality factor in bulk-mode micromechanical resonators," IEEE International Conf. on Micro Electro Mechanical Systems, pp.74-77, 2005.
15. R. Tabrizian, M. Rais-Zadeh, F. Ayazi, "Effect of phonon interactions on limiting the f.Q of micromechanical resonators," Int. Conf. on Solid-State Sensors, Actuator, Microsystems, pp. 2131-2134, 2009.
16. D. Goettler, M. Su, Z. Leseman, Y. Soliman, Roy H. Olsson, and I. El-Kady, "Realizing f.Q product limit in silicon via compact phononic crystal resonators," J. App. Phys., in press.
17. A. Khelif, B. Aoubiza, S. Mohammadi, A. Adibi, V. Laude, "Complete band gaps in two-dimensional phononic crystal slabs," Phys. Rev. E, vol. 74, 046610, 2006.
18. S. Mohammadi, A. A. Eftekhar, A. Khelif, W. D. Hunt, A. Adibi, "Evidence of large high-frequency complete phononic band gaps in silicon phononic crystal plates," Appl. Phys. Lett., vol. 92, pp. 221905, 2008.
19. S. Benchabane, A. Khelif, J.-Y. Rauch, L. Robert, V. Laude, "Evidence for complete surface wave band gap in a piezoelectric phononic crystal," Phys Rev. E, vol. 73(6), pp. 065601, 2006.
20. T.-T. Wu, Z.-G. Huang, and S. Lin, "Surface and bulk acoustic waves in two-dimensional phononic crystal consisting of materials with general anisotropy," Physical Review B (Condensed Matter), vol. 69, pp. 94301-1-10, 1 March 2004.
21. C. M. Reinke, M. Su, M. Ziaei-Moayyed, R. H. Olsson III, and I. El-Kady, "Investigation of full bandgaps in silicon phononic crystal membranes with tungsten and air inclusions," IEEE Ultrasonics Symposium, San Diego, CA, October 2010 - in press.
22. M. M. Sigalas, and N. Garcia, "Theoretical study of three dimensional elastic band gaps with the finite-difference time-domain method J. Appl. Phys., vol. 87, pp. 3122-5, 2000.
23. M. Ke, Z. Liu, C. Qiu, W. Wang, J. Shi, W. Wen, and P. Sheng, "Negative-refraction imaging with two-dimensional phononic crystals," Phys. Rev. B, vol. 72, 064306, 2005.
24. S. Yang, J. H. Page, Z. Liu, M. L. Cowan, C. T. Chan, and P. Sheng, "Focusing of sound in a 3D phononic crystal," Phys. Rev. Lett, vol.93, 024301, 2004.