Fabrication and electrical integration of robust carbon nanotube micropillars by self-directed elastocapillary densification

Journal of Micromechanics and Microengineering

Volumn 21, Issue 4, 2011, Pages

  De Volder, Michaël F L ^a,b,c   Park, Sei Jin ^a   Tawfick, Sameh H ^a   Vidaud, Daniel O ^a   Hart, A John ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b IMEC   (Belgium)

^c UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL APPLICATIONS; BULK PROPERTIES; CAPILLARY ACTION; DESIGN RULES; ELECTRICAL CONDUCTIVITY; MICRO-PILLARS; MICROFABRICATED DEVICES; PACKING DENSITY; PARAMETRIC STUDY; PATTERNED CATALYST; PER UNIT; PRECISE CONTROL; THREE ORDERS OF MAGNITUDE; UNIFORM STRUCTURE; VERTICALLY ALIGNED CARBON NANOTUBE; YOUNG'S MODULUS;

CARBON FILMS; CARBON NANOTUBES; DENSIFICATION; ELECTRIC CONDUCTIVITY; FUNCTIONAL MATERIALS; INTEGRATION; LIQUIDS; MECHANICAL PROPERTIES; MICROFABRICATION;

CHEMICAL VAPOR DEPOSITION;

EID: 79953661988     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/4/045033     Document Type: Article

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