Self-similar organization of arrays of individual carbon nanotubes and carbon nanotube micropillars

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1233-1238

  De Volder, Michaël F L ^a,b,c   Vidaud, Daniel O ^a   Meshot, Eric R ^a   Tawfick, Sameh ^a   John Hart, A ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b IMEC   (Belgium)

^c UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Carbon nanotube; CNT; CVD; Microstructure; Self organization

Indexed keywords

ANISOTROPIC STRUCTURE; CATALYST NANOPARTICLE; CVD; DRY ADHESIVE; ELECTRICAL INTERCONNECTS; ELECTRICAL PROPERTY; INITIAL STAGES; INTERFACIAL PROPERTY; ISOLATED PILLARS; MICRO-PILLARS; MICRON SCALE; NANOSTRUCTURED FILMS; SELF-ORGANIZATIONS; SELF-SIMILAR; SMALL-DIAMETER; THERMAL INTERFACES; VERTICAL DIRECTION; VERTICALLY ALIGNED;

ANISOTROPY; CHEMICAL VAPOR DEPOSITION; ELECTRIC PROPERTIES; FILM GROWTH; MECHANICAL PROPERTIES; MICROSTRUCTURE;

CARBON NANOTUBES;

EID: 77149149059     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.11.139     Document Type: Article

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