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Volumn 109, Issue 6, 2011, Pages

A study of the specific contact resistance and channel resistivity of amorphous IZO thin film transistors with IZO source-drain metallization

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS OXIDES; ANNEALED STATE; AS-DEPOSITED STATE; CARRIER DENSITY; CHANNEL DEVICE; CHANNEL LAYERS; CHANNEL RESISTIVITY; DEVICE APPLICATION; GATE VOLTAGES; HOMO-JUNCTIONS; LOW CARRIER DENSITY; METALLIZATIONS; OFF-STATE CURRENT; POSITIVE GATE BIAS; SOURCE-DRAIN; SPECIFIC CONTACT RESISTANCES; TRANSMISSION LINE MODELS; ZERO BIAS;

EID: 79953656609     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3549810     Document Type: Article
Times cited : (80)

References (17)
  • 2
    • 13544269370 scopus 로고    scopus 로고
    • High mobility transparent thin-film transistors with amorphous zinc tin oxide channel layer
    • DOI 10.1063/1.1843286, 013503
    • H. Q. Chiang, J. F. Wager, R. L. Hoffman, J. Jeong, and D. A. Keszler, Appl. Phys. Lett. 86, 013503 (2005). 10.1063/1.1843286 (Pubitemid 40219489)
    • (2005) Applied Physics Letters , vol.86 , Issue.1 , pp. 0135031-0135033
    • Chiang, H.Q.1    Wager, J.F.2    Hoffman, R.L.3    Jeong, J.4    Keszler, D.A.5
  • 3
    • 9744248669 scopus 로고    scopus 로고
    • Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors
    • DOI 10.1038/nature03090
    • K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, and H. Hosono, Nature (London) 432, 488 (2004). 10.1038/nature03090 (Pubitemid 39585210)
    • (2004) Nature , vol.432 , Issue.7016 , pp. 488-492
    • Nomura, K.1    Ohta, H.2    Takagi, A.3    Kamiya, T.4    Hirano, M.5    Hosono, H.6
  • 6
    • 44249123058 scopus 로고    scopus 로고
    • Amorphous IZO-based transparent thin film transistors
    • DOI 10.1016/j.tsf.2007.10.081, PII S0040609007017051
    • D. C. Paine, B. Yaglioglu, Z. Beiley, and S. Lee, Thin Solid Films 516, 5894 (2008). 10.1016/j.tsf.2007.10.081 (Pubitemid 351726013)
    • (2008) Thin Solid Films , vol.516 , Issue.17 , pp. 5894-5898
    • Paine, D.C.1    Yaglioglu, B.2    Beiley, Z.3    Lee, S.4
  • 8
    • 44249094185 scopus 로고    scopus 로고
    • Specific contact resistances between amorphous oxide semiconductor In-Ga-Zn-O and metallic electrodes
    • DOI 10.1016/j.tsf.2007.10.051, PII S0040609007017270
    • Y. Shimura, K. Nomura, H. Yanagi, T. Kamiya, M. Hirano, and H. Hosono, Thin Solid Films 516, 5899 (2008). 10.1016/j.tsf.2007.10.051 (Pubitemid 351726028)
    • (2008) Thin Solid Films , vol.516 , Issue.17 , pp. 5899-5902
    • Shimura, Y.1    Nomura, K.2    Yanagi, H.3    Kamiya, T.4    Hirano, M.5    Hosono, H.6
  • 9
    • 41349115687 scopus 로고    scopus 로고
    • Carrier concentration dependence of Ti/Au specific contact resistance on n -type amorphous indium zinc oxide thin films
    • DOI 10.1063/1.2902322
    • W. T. Lim, D. P. Norton, J. H. Jang, V. Craciun, S. J. Pearton, and F. Ren, Appl. Phys. Lett. 92, 122102 (2008). 10.1063/1.2902322 (Pubitemid 351451636)
    • (2008) Applied Physics Letters , vol.92 , Issue.12 , pp. 122102
    • Lim, W.1    Norton, D.P.2    Jang, J.H.3    Craciun, V.4    Pearton, S.J.5    Ren, F.6
  • 10
    • 33947589038 scopus 로고    scopus 로고
    • High-pressure and high-temperature annealing as an activation method for ion-implanted dopants in diamond
    • DOI 10.1063/1.2715034
    • J. I. Song, J. S. Park, H. Kim, Y. W. Heo, J. H. Lee, J. J. Kim, G. M. Kim, and B. D. Choi, Appl. Phys. Lett. 90, (2007). 10.1063/1.2715034 (Pubitemid 46482235)
    • (2007) Applied Physics Letters , vol.90 , Issue.12 , pp. 122102
    • Ueda, K.1    Kasu, M.2    Makimoto, T.3
  • 11
    • 33745435681 scopus 로고    scopus 로고
    • Ionic amorphous oxide semiconductors: Material design, carrier transport, and device application
    • DOI 10.1016/j.jnoncrysol.2006.01.073, PII S0022309306002936
    • H. Hosono, J. Non-Cryst. Solids 352, 851 (2006). 10.1016/j.jnoncrysol. 2006.01.073 (Pubitemid 43949008)
    • (2006) Journal of Non-Crystalline Solids , vol.352 , Issue.9-20 SPEC. ISSUE , pp. 851-858
    • Hosono, H.1
  • 12
    • 0001672081 scopus 로고
    • 10.1016/0038-1101(72)90048-2
    • H. H. Berger, Solid-State Electron 15, 145 (1972). 10.1016/0038-1101(72) 90048-2
    • (1972) Solid-State Electron , vol.15 , pp. 145
    • Berger, H.H.1
  • 13
    • 27744577532 scopus 로고    scopus 로고
    • Floating contact transmission line modelling: An improved method for ohmic contact resistance measurement
    • DOI 10.1016/j.sse.2005.06.023, PII S0038110105001838
    • M. Lijadi, F. Pardo, N. Bardou, and J. L. Pelouard, Solid-State Electron. 49, 1655 (2005). 10.1016/j.sse.2005.06.023 (Pubitemid 41586538)
    • (2005) Solid-State Electronics , vol.49 , Issue.10 , pp. 1655-1661
    • Lijadi, M.1    Pardo, F.2    Bardou, N.3    Pelouard, J.-L.4
  • 17
    • 28044456345 scopus 로고    scopus 로고
    • 3-10 wt.% ZnO thin films deposited by DC magnetron sputtering
    • DOI 10.1016/j.tsf.2005.08.255, PII S004060900501504X, Proceedings of the Fourth International Symposium on Transparent Oxide Thin Film for Electronics and Optics (TOEO-4)
    • B. Yaglioglu, Y. J. Huang, H. Y. Yeom, and D. C. Paine, Thin Solid Films 496, 89 (2006). 10.1016/j.tsf.2005.08.255 (Pubitemid 41689868)
    • (2006) Thin Solid Films , vol.496 , Issue.1 , pp. 89-94
    • Yaglioglu, B.1    Huang, Y.-J.2    Yeom, H.-Y.3    Paine, D.C.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.