A study of amorphous and crystalline phases in In2O 3-10 wt.% ZnO thin films deposited by DC magnetron sputtering

Thin Solid Films

Volumn 496, Issue 1, 2006, Pages 89-94

  Yaglioglu, Burag ^a   Huang, Yen Jung ^a   Yeom, Hyo Young ^a   Paine, David C ^a  

^a BROWN UNIVERSITY   (United States)

Author keywords

Amorphous phase stability; DC magnetron sputtering; ITO; IZO; Rhombohedral indium oxide; TCO; Transparent conducting oxide

Indexed keywords

AMORPHOUS FILMS; ANNEALING; CARRIER CONCENTRATION; CRYSTALLIZATION; ELECTRIC CONDUCTIVITY; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; ZINC OXIDE;

AMORPHOUS PHASE STABILITY; DC MAGNETRON SPUTTERING; ITO; IZO; RHOMBOHEDRAL INDIUM OXIDE; TCO; TRANSPARENT CONDUCTING OXIDE;

THIN FILMS;

EID: 28044456345     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.255     Document Type: Conference Paper

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