Effects of deposition temperature and seed layer on the optical properties of lead zirconate titanate films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 20, Issue 4, 2002, Pages 1498-1504

  Kang, Hee Soo ^a   Lee, Won Jong ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; ELECTROMAGNETIC WAVE POLARIZATION; ELECTROOPTICAL EFFECTS; GLASS; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; PERMITTIVITY; PHASE COMPOSITION; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; TEMPERATURE; X RAY DIFFRACTION ANALYSIS;

ELECTRO-OPTIC COEFFICIENT; LEAD ZIRCONATE TITANATE FILMS; PROPAGATION LOSS; REMNANT POLARIZATION;

SEMICONDUCTING LEAD COMPOUNDS;

EID: 0036648931     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1488947     Document Type: Article

References (17)