Effect of thickness on microstructure and electrical properties of PZT films prepared by a modified Sol-Gel method

Ferroelectrics

Volumn 328, Issue , 2005, Pages 21-25

  Mengwei, Liu ^a   Jianhua, Tong ^a   Jing, Wang ^a   Weijie, Dong ^a   Tianhong, Gui ^a,b   Liding, Wang ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b LOUISIANA TECH UNIVERSITY   (United States)

Author keywords

Electrical property; Orientation; PZT thin film; Sol gel; Thickness

Indexed keywords

ANNEALING; COATINGS; ELECTRIC PROPERTIES; LEAD COMPOUNDS; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; SOL-GELS; X RAY DIFFRACTION ANALYSIS;

COATING LAYERS; PHASE STRUCTURES; PZT THIN FILMS;

FERROELECTRIC THIN FILMS;

EID: 33751259155     PISSN: 00150193     EISSN: 15635112     Source Type: Conference Proceeding    
DOI: 10.1080/00150190500310831     Document Type: Article

References (8)

1. Paul Murait, IEEE Trans. Ultrasonics, Ferroelectrics, Freq. Control 47, 903-915 (2000).
2. Funakubo Hiroshi et al., Thin Solid Films 368, 261-265 (2000).
3. Reji Thomas et al., Mater. Sci. Eng. B 95, 36-42 (2002).
4. P. V. Burmistrova and A. S. Sigov et al., Ferroelectrics 271, 51-56 (2002).
5. Hirotake Fujita et al., Appl. Surf. Sci. 159-160, 134-137 (2000).
6. Yoon J. Song, Yongfei Zhu et al. Appl. Phys. Lett. 72, 2686-2688 (1998).
7. Apurba Laha and S. B. Krupanidhi, Mater. Sci. Eng. B 98, 204-212 (2003).
8. Jinrong Cheng and Zhongyan Meng, Thin Solid Films 385, 5-10 (2001).