Characterization of M-plane GaN film grown on β-LiGaO2 (100) by plasma-assisted molecular beam epitaxy

Thin Solid Films

Volumn 519, Issue 11, 2011, Pages 3569-3572

  Shih, Cheng Hung ^a   Lo, Ikai ^a   Pang, Wen Yuan ^a   Wang, Ying Chieh ^a   Chou, Mitch M C ^a  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

Lithium gallate; M plane gallium nitride; Molecular beam epitaxy; Photoluminescence; Raman scattering; X ray diffraction

Indexed keywords

GAN CRYSTALS; GAN FILM; GAN THIN FILMS; LITHIUM GALLATE; M-PLANE; MICRO-RAMAN SCATTERING; PLASMA-ASSISTED MOLECULAR BEAM EPITAXY;

ATOMIC FORCE MICROSCOPY; COMPRESSIVE STRESS; DIFFRACTION; EPITAXIAL GROWTH; GALLIUM NITRIDE; LITHIUM; MOLECULAR BEAM EPITAXY; PHOTOLUMINESCENCE; RAMAN SCATTERING; SCATTERING; SUBSTRATES; TENSILE STRESS; THIN FILMS; X RAY DIFFRACTION; X RAYS;

MOLECULAR BEAMS;

EID: 79952739943     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.01.275     Document Type: Article

References (23)

1. L.W. Tu, C.L. Hsiao, T.W. Chi, I. Lo, and K.Y. Hsieh Appl. Phys. Lett. 82 2003 1601
2. Chia-Ho Hsieh, I. Lo, Ming-Hong Gau, Yen-Liang Chen, Ming-Chi Chou, Wen-Yuan Pang, Yao-I Chang, Yu-Chi Hsu, Meng-Wei Sham, Jih-Chen Chiang, and Jenn-Kai Tsai Jpn. J. Appl. Phys 47 2008 891
3. Sangbeom Kang, W. Alan Doolittle, K.K. Lee, Z.R. Dai, Z.L. Wang, Stuart R. Stock, and April S. Brown J. Electron. Mater. 30 2001 156
4. I. Lo, W.T. Wang, M.H. Gau, J.K. Tsai, S.F. Tsay, and J.C. Chiang Appl. Phys. Lett. 88 2006 082108
5. J.A. Garrido, J.L. Sanchez-Rojas, A. Jimenez, E. Munoz, F. Omnes, and P. Gibart Appl. Phys. Lett. 75 1999 2407
6. P. Waltereit, O. Brandt, A. Trampert, H.T. Grahn, J. Menniger, M. Ramsteiner, M. Reiche, and K.H. Ploog Nature (London) 406 2000 865
7. M. Marezio Acta Crystallogr. 18 1965 481
8. R. Schuber, M.M.C. Chou, and D.M. Schaadt Thin Solid Films 518 2010 6773
9. R. Schuber, M.M.C. Chou, P. Vincze, Th. Schimmel, and D.M. Schaadt J. Cryst. Growth 312 2010 1665
10. P. Kung, A. Saxler, X. Zhang, D. Walker, R. Lavado, and M. Razeghi Appl. Phys. Lett. 69 1996 2116
11. I. Lo, C.-H. Hsieh, Y.-C. Hsu, W.-Y. Pang, and M.-C. Chou Appl. Phys. Lett. 94 2009 062105
12. D.R. Hang, Mitch M.C. Chou, Liuwen Chang, Y. Dikme, and M. Heuken J. Cryst. Growth 311 2009 452
13. W.A. Doolittle, S. Kang, T.P. Kropewnicki, S. Stock, P.A. Khol, and A.S. Brown J. Electron. Mater. 27 1998 L58
14. R.J. Matyi, W.A. Doolittle, and A.S. Brown J. Phys. D Appl. Phys. 32 1999 A61
15. S. Kang, A. Doolittle, and A.S. Brown Appl. Phys. Lett. 74 1999 3380
16. Y.J. Sun, O. Brandt, U. Jahn, T.Y. Liu, A. Trampert, S. Cronenberg, S. Dhar, and K.H. Ploog J. Appl. Phys. 92 2002 5714
17. L. Lymperakis, and J. Neugebauer Phys. Rev. B 79 2009 241308
18. A. Hirai, B.A. Haskell, M.B. McLaurin, F. Wu, M.C. Schmidt, K.C. Kim, T.J. Baker, S.P. DenBaars, S. Nakamura, and J.S. Speck Appl. Phys. Lett. 90 2007 121119
19. S. Ghosh, P. Waltereit, O. Brandt, H.T. Grahn, and K.H. Ploog Phys. Rev. B 65 2002 75202
20. R. Liu, A. Bell, F.A. Ponce, C.Q. Chen, J.W. Yang, and M.A. Khan Appl. Phys. Lett. 86 2005 021908
21. P. Perlin, C. Jauberthie-Carillon, J.P. Itie, A.S. Miguel, I. Grezgory, and A. Polian Phys. Rev. B 45 1992 83
22. K.R. Wang, M. Ramsteiner, C. Mauder, Q. Wan, T. Hentschel, H.T. Grahn, H. Kalisch, M. Heuken, R.H. Jansen, and A. Trampert Appl. Phys. Lett. 96 2010 231914
23. K. Jeganathan, R.K. Debnath, R. Meijers, T. Stoica, R. Calarco, D. Grützmacher, and H. Lüth J. Appl. Phys. 105 2009 123707